Acoustic Reflectors for Anchor Loss Reduction of Thin Film Piezoelectric on Substrate Resonators

Liu, Jiacheng; Workie, Temesgen Bailie; Wu, Zhaohui; Tang, Panliang; Bao, Jingfu; Hashimoto, Ken–ya

doi:10.1109/iws52775.2021.9499583

Cited by 5 publications

(12 citation statements)

References 9 publications

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“…In this regard, the quality factor of the micromachined resonator includes many items such as anchor quality factor (Qanchor), electrode quality factor (Qelectrode), TED quality factor (QTED), material quality factor (Qmaterial), and unknown quality factor (Qunknown). The equivalent Q can be expressed with the following equation [16]:…”

Section: Introductionmentioning

confidence: 99%

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Reem-Shape Phononic Crystal for Q anchor enhancement of TPoS MEMS Resonator

Awad¹,

Workie²,

Bao³

et al. 2023

Preprint

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: This paper proposes a reem-shape phononic crystal for the performance enhancement of TPoS resonators. The proposed phononic crystal offers an ultra-wide acoustic band gap that prevents energy leakage through the supporting substrate on its placement at the anchoring boundary, resulting in significant improvements in the resonator quality factor. Simulated results show reem-shape Phononic crystals generate a band gap up to 175MHz with BG of 90% and enhance the anchor quality factor from 180,000 to 6,000,000 and unloaded quality factor from 133,000 to 160,000 representing 33.3-fold and 1.2-fold improvements respectively.

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Section: Introductionmentioning

confidence: 99%

“…This loss is mainly due to the radiation of acoustic waves to the supporting substrate through tethers. One of the mechanisms used to mitigate this loss is using acoustic reflectors [14][15][16]. The shortcoming of this method is not efficient in reducing anchor loss.…”

Section: Introductionmentioning

confidence: 99%

Reem-Shape Phononic Crystal for Q anchor enhancement of TPoS MEMS Resonator

Awad¹,

Workie²,

Bao³

et al. 2023

Preprint

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show abstract

“…Furthermore, in [32] the effect of placing 2 D-PnC on the tether and/or the anchoring boundaries of the resonator is demonstrated, and an improvement of about 3-fold in Q is reported. Another approach reported recently is deploying acoustic reflectors on the anchoring boundaries of the resonator, aiming to reflect some of the radiated elastic waves back to the resonant plate [33]. The major pitfall of these techniques is the limited enhancement in Q, as the reflection of acoustic waves is finished once it reaches the anchoring boundaries or at least after it passes the supporting tether.…”

Section: Introductionmentioning

confidence: 99%

Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

Workie

Tang

et al. 2022

Micromachines

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This paper examines a new technique to improve the figure of merit of laterally vibrating RF-MEMS resonators through an energy-preserving suspended addendum frame structure using finite element analysis. The proposed suspended addendum frame on the sides of the resonant plate helps as a mechanical vibration isolator from the supporting substrate. This enables the resonator to have a low acoustic energy loss, resulting in a higher quality factor. The simulated attenuation characteristics of the suspended addendum frame are up to an order of magnitude larger than those achieved with the conventional structure. Even though the deployed technique does not have a significant impact on increasing the effective electromechanical coupling coefficient, due to a gigantic improvement in the unloaded quality factor, from 4106 to 51,136, the resonator with the suspended frame achieved an 11-folds improvement in the figure of merit compared to that of the conventional resonator. Moreover, the insertion loss was improved from 5 dB down to a value as low as 0.7 dB. Furthermore, a method of suppressing spurious mode is demonstrated to remove the one incurred by the reflected waves due to the proposed energy-preserving structure.

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“…Based on this, it is urgently necessary to use some effective methods to suppress the anchor loss of the resonators. Presently, researchers have proposed a number of methods to reduce the resonator’s anchor loss [ 6 , 9 , 10 , 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 ]. For example, the anchor point is placed [ 6 ] at a minor resonator node.…”

Section: Introductionmentioning

confidence: 99%

“…The resonator boundary displacement is almost zero; thus, optimizing the loss of the resonator is designed into the butterfly [ 9 ], the etching stress release hole [ 10 ] on the resonator or the resonator edge to reduce the acoustic energy dissipated through the support beam. Based on the Bragg reflection law, introducing the acoustic mirror [ 12 , 13 ] or the phonon crystal structure [ 14 , 15 , 16 , 17 , 18 , 19 , 20 ] can reflect the acoustic waves propagating from the resonator, thus effectively reducing the anchor loss. In recent years, the continuous development of phonon crystal correlation theory will provide a good idea for many scientists to use phonon crystal to reduce the anchor loss of resonators.…”

Section: Introductionmentioning

confidence: 99%

Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal

Zhu

Liu

et al. 2022

Sensors

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Anchor loss is usually the most significant energy loss factor in Micro-Electro-Mechanical Systems (MEMS) resonators, which seriously hinders the application of MEMS resonators in wireless communication. This paper proposes a cross-section connection phononic crystal (SCC-PnC), which can be used for MEMS resonators of various overtone modes. First, using the finite element method to study the frequency characteristics and delay line of the SCC-PnC band, the SCC-PnC has an ultra-wide bandgap of 56.6–269.6 MHz. Next, the effects of the height h and the position h1 of the structural parameters of the small cross-connected plate on the band gap are studied, and it is found that h is more sensitive to the width of the band gap. Further, the SCC-PnC was implanted into the piezoelectric MEMS resonator, and the admittance and insertion loss curves were obtained. The results show that when the arrangement of 4 × 7 SCC-PnC plates is adopted, the anchor quality factors of the third-order overtone, fifth-order overtone, and seventh-order overtone MEMS resonators are increased by 1656 times, 2027 times, and 16 times, respectively.

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Acoustic Reflectors for Anchor Loss Reduction of Thin Film Piezoelectric on Substrate Resonators

Cited by 5 publications

References 9 publications

Reem-Shape Phononic Crystal for Q anchor enhancement of TPoS MEMS Resonator

Reem-Shape Phononic Crystal for Q anchor enhancement of TPoS MEMS Resonator

Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame

Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal

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