1995
DOI: 10.1007/bf00352128
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Acoustic investigation of porous silicon layers

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Cited by 53 publications
(48 citation statements)
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“…However, excepting some simple empirical relations [2], a general theoretical modeling tool able to recover experimental data and to predict material properties at particular pore sizes and shapes is still missing. As the continuum theory fails to apply at the length scale of pores in nano-PSi we propose a discrete homogenization model and show that under certain regularity assumptions (such as uniformity of shapes and distributions of the pores) the method predicts a mechanical macroscopic behavior that fits remarkably well the experimental data reported in [3][4][5][6] for a wide range of porosities. The method can be easily extend in order to include much more complicated situations such as: other porous semiconductors, more complex microscopic symmetries, compositional effects (like back-bond oxidation) and mechanical related behavior including joint bulk and surface effects.…”
mentioning
confidence: 52%
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“…However, excepting some simple empirical relations [2], a general theoretical modeling tool able to recover experimental data and to predict material properties at particular pore sizes and shapes is still missing. As the continuum theory fails to apply at the length scale of pores in nano-PSi we propose a discrete homogenization model and show that under certain regularity assumptions (such as uniformity of shapes and distributions of the pores) the method predicts a mechanical macroscopic behavior that fits remarkably well the experimental data reported in [3][4][5][6] for a wide range of porosities. The method can be easily extend in order to include much more complicated situations such as: other porous semiconductors, more complex microscopic symmetries, compositional effects (like back-bond oxidation) and mechanical related behavior including joint bulk and surface effects.…”
mentioning
confidence: 52%
“…The right-hand-side in (6) is linear in E as it can be easily seen by inspection in (3) and (4). Using the solution of (6) in (2) we are lead toŴ (E) = W (E, {ũ(E)}) so that the macroscopic elasticity can be computed as…”
Section: Discrete Homogenizationmentioning
confidence: 96%
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“…The mass density q j is a function of the porosity and is described by q j ¼ q 0 ð1 À P j Þ, where q 0 ¼ 2:330 g=cm 3 is the mass density of bulk silicon and P j is the porosity in the j-th layer. The acoustic velocity dependence on porosity is given empirically by 25,26 …”
Section: Theoretical Modelmentioning
confidence: 99%