2013
DOI: 10.1063/1.4802781
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Acoustic interference suppression of quartz crystal microbalance sensor arrays utilizing phononic crystals

Abstract: Acoustic interference suppression of quartz crystal microbalance (QCM) sensor arrays utilizing phononic crystals is investigated in this paper. A square-lattice phononic crystal structure is designed to have a complete band gap covering the QCM's resonance frequency. The monolithic sensor array consisting of two QCMs separated by phononic crystals is fabricated by micromachining processes. As a result, 12 rows of phononic crystals with band gap boost insertion loss between the two QCMs by 20 dB and also reduce… Show more

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Cited by 14 publications
(6 citation statements)
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“…and/or spin-orbit coupling, silicene is also expected to be a promising candidate for superconductors [6] and/or topological insulators [7]. In contrast to graphene, however, the preparation of silicene is quite difficult: it cannot be exfoliated from bulk silicon because silicon atoms in the bulk are only sp 3 -hybridized while those in silicene are sp 2 /sp 3 hybridized [8].…”
mentioning
confidence: 99%
“…and/or spin-orbit coupling, silicene is also expected to be a promising candidate for superconductors [6] and/or topological insulators [7]. In contrast to graphene, however, the preparation of silicene is quite difficult: it cannot be exfoliated from bulk silicon because silicon atoms in the bulk are only sp 3 -hybridized while those in silicene are sp 2 /sp 3 hybridized [8].…”
mentioning
confidence: 99%
“…At present, although most analytical and semi-analytical solutions have been proved to be correct near the resonance frequency, many mechanical properties have been ignored due to the simplification of the model. The finite element technique is a powerful numerical tool which has been proved to be able to simulate the thickness shear vibration of quartz crystal microbalances well [ 24 , 25 , 26 , 27 , 28 , 29 ]. The finite element equation of structural mechanics and electrostatic coupling of AT cut quartz crystal element is as follows [ 30 ]: where , and are the mass, damping and stiffness matrices of structure, respectively.…”
Section: Multiple-physical Field Simulationmentioning
confidence: 99%
“…All these studies are just about tuning the bandgap and there is no discussion about the design of any ultrasonic devices. Acoustic switches based on phononic crystals have attracted some investigations recently [10][11][12], but because of the limitations and challenges in the design of ultrasonic switches based on phononic crystals, designed structures only limited to the on-off type switches for a special frequency range. In this study, Ethanol, Methyl nonafluorobutyl ether (MNE) and Quartz are introduced as suitable materials for a phononic crystal structure, which has the required features for the fine thermal tuning of band structures.…”
Section: Introductionmentioning
confidence: 99%