Acoustic Fields in Thin Fluid Layers Between Vibrating Walls and Rigid Boundaries: Integral Method

Honzík, Petr; Bruneau, Michel

doi:10.3813/aaa.918880

Cited by 7 publications

(5 citation statements)

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“…Due to the symmetry of the transducer’s geometry, the solution of ( 14 ) for nonuniform

is expressed here in the first quadrant only (namely,

). The chosen Green’s function used in the integral formulation for the solution of ( 14 ) satisfies the same Neumann’s condition (the first derivative vanishes) at

as the solution for the acoustic pressure, which can be expressed as follows [ 26 , 27 , 29 ]:

with the Green’s function being given by

with

where

denotes the cylindrical Hankel function of the second kind of order “0”.…”

Section: Analytical Solutionmentioning

confidence: 99%

“…In the same reference, the acoustic pressure in the air gap was expressed using integral formulation with appropriate Green’s function, which was not expressed as a series expansion over the eigenfunctions of the moving electrode. Such a fomulation is also advantageous in the case of rectangular geometries [ 26 , 27 ] and is therefore used herein. It is worth mentioning the numerical methods, namely, the finite element method, which can take into account the thermoviscous losses and the coupling effects without geometry-dependent approximations [ 28 ].…”

Section: Introductionmentioning

confidence: 99%

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Modeling of MEMS Transducers with Perforated Moving Electrodes

Simonova

Honzík

2023

Micromachines

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Microfabricated electroacoustic transducers with perforated moving plates used as microphones or acoustic sources have appeared in the literature in recent years. However, optimization of the parameters of such transducers for use in the audio frequency range requires high-precision theoretical modeling. The main objective of the paper is to provide such an analytical model of a miniature transducer with a moving electrode in the form of a perforated plate (rigid elastically supported or elastic clamped at all boundaries) loaded by an air gap surrounded by a small cavity. The formulation for the acoustic pressure field inside the air gap enables expression of the coupling of this field to the displacement field of the moving plate and to the incident acoustic pressure through the holes in the plate. The damping effects of the thermal and viscous boundary layers originating inside the air gap, the cavity, and the holes in the moving plate are also taken into account. The analytical results, namely, the acoustic pressure sensitivity of the transducer used as a microphone, are presented and compared to the numerical (FEM) results.

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“…Due to the symmetry of the transducer’s geometry, the solution of ( 14 ) for nonuniform

is expressed here in the first quadrant only (namely,

). The chosen Green’s function used in the integral formulation for the solution of ( 14 ) satisfies the same Neumann’s condition (the first derivative vanishes) at

as the solution for the acoustic pressure, which can be expressed as follows [ 26 , 27 , 29 ]:

with the Green’s function being given by

with

where

denotes the cylindrical Hankel function of the second kind of order “0”.…”

Section: Analytical Solutionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Modeling of MEMS Transducers with Perforated Moving Electrodes

Simonova

Honzík

2023

Micromachines

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“…The time-dependent non-uniform displacement of the diaphragm ξ( r, t) is supposed to be outwardly directed (such as in many models of electrostatic transducers [20]), the time-dependent total capacitance C t (t) can be then calculated from the displacement averaged over the active surface ξ(t) = S a ξ( r, t) dS a /S a as follows…”

Section: Model Of Condenser Microphone Distortionmentioning

confidence: 99%

Measurement of nonlinear distortion of MEMS microphones

Novák

Honzík

2021

Applied Acoustics

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“…This is evident from first comprehensive review in Zandergen and Dijkstra [19] to current application on this subject. Hanzik and Bruneau [20] used numerical method to investigate axially symmetric flow of a viscous incompressible fluid between two infinite rotating disks. Szeri et al [21] made experiments to observe velocity flied of water between finite rotating disks with and without through-flow.…”

Section: Introductionmentioning

confidence: 99%

Microscale flow and heat transfer between the rotor and the flank for rotary engine

Qin

2021

THERM SCI

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This paper is to investigate microscale flow and transfer between the rotor and the flank for rotary engine. The rotor and flank is simplified to two disks in order to study flow field and temperature field conveniently. The paper takes analysis of steady laminar flow and heat transfer between two disks separated by a gas-filled gap due to machining tolerance. A 3-D multi-physical coupling model is used, involving velocity slip, temperature jump, rarefaction and dissipation. A solution based on commercial code COMSOL is derived and the results are used to illustrate the effects to velocity field, temperature distribution, disks' torque and Nusselt number based on the governing parameters. The paper also investigates the effects of different modified Knudsen number on flow field and temperature field.

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Acoustic Fields in Thin Fluid Layers Between Vibrating Walls and Rigid Boundaries: Integral Method

Cited by 7 publications

References 0 publications

Modeling of MEMS Transducers with Perforated Moving Electrodes

Modeling of MEMS Transducers with Perforated Moving Electrodes

Measurement of nonlinear distortion of MEMS microphones

Microscale flow and heat transfer between the rotor and the flank for rotary engine

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