Measurement of nonlinear distortion of MEMS microphones

A Non-Dimensional Time-Domain Lumped Model for Externally Dc Biased Capacitive Microphones with Two Electrodes

“…To show that our system of equations represents a valid model of a miniature microphone device, such as a MEMS microphone, we use nonlinear measurements on such a device from literature [20] and show that for a set of physical parameters, our model agrees well with those measurements. The authors in [20] use a setup that consists of a loudspeaker, the device under test, and a reference microphone enclosed in a box.…”

“…To show that our system of equations represents a valid model of a miniature microphone device, such as a MEMS microphone, we use nonlinear measurements on such a device from literature [20] and show that for a set of physical parameters, our model agrees well with those measurements. The authors in [20] use a setup that consists of a loudspeaker, the device under test, and a reference microphone enclosed in a box. They implement a method of harmonic correction to ensure that a pure harmonic acoustic pressure is reproduced in the loudspeaker during the measurements aiming at measuring the nonlinear response occurring when the system is excited with a single harmonic pressure signal.…”

“…Fig. 12.Pressure response of the model (y-axis) with respect to the applied pressure (x-axis) compared with the response of the measurements presented in[20] at 200 Hz.…”

Microelectromechanical Systems (MEMS) for Biomedical Applications

“…In 1995, Bergveld first introduced the possibility of large-scale equipment miniaturization for chemical analysis [9]. As MEMS devices are currently present in all aspects of the daily life (e.g., image [10], touch [11,12], distance [13], pressure [14][15][16][17][18], temperature [19][20][21], and humidity [22][23][24][25] sensors, microphones [26][27][28][29], gyroscopes [30][31][32][33], accelerometers [34][35][36][37], and magnetometers [38][39][40]), the worldwide MEMS market is expected to grow to $25 billion by 2022 (Figure 1) [3,4,[41][42][43]. Reprinted from an open-access source [43].…”