Electrically driven Er3+ doped Si slot waveguides emitting at 1530 nm are demonstrated. Two different Er 3+ doped active layers were fabricated in the slot region: a pure SiO 2 and a Si-rich oxide. Pulsed polarization driving of the waveguides was used to characterize the time response of the electroluminescence (EL) and of the signal probe transmission in 1 mm long waveguides. Injected carrier absorption losses modulate the EL signal and, since the carrier lifetime is much smaller than that of Er 3+ ions, a sharp EL peak was observed when the polarization was switched off. A time-resolved electrical pump & probe measurement in combination with lock-in amplifier techniques allowed to quantify the injected carrier absorption losses. We found an extinction ratio of 6 dB, passive propagation losses of about 4 dB/mm, and a spectral bandwidth > 25 nm at an effective d.c. power consumption of 120 μW. All these performances suggest the usage of these devices as electro-optical modulators. Pavesi, N. Prtljaga, P. Rivallin, A. Tengattini, D. Navarro-Urrios, and B. Garrido, "Er-doped light emitting slot waveguides monolithically integrated in a silicon photonic chip," Nanotechnology (to be published).
©2012 Optical Society of America