Accurate surface profilometry using differential optical sectioning microscopy with structured illumination

Xie, Zhongye; Tang, Yan; Feng, J.; Liu, Junbo; Hu, Song

doi:10.1364/oe.27.011721

Cited by 17 publications

(1 citation statement)

References 14 publications

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“…This approach necessitates transverse point-by-point scanning for 2D imaging and axial layer-by-layer scanning for 3D measurements [8]. The surface topography of the tested sample is determined through the peak localization algorithm applied to the confocal axial light intensity response curve.…”

Section: Introductionmentioning

confidence: 99%

Differential confocal effective measurement region extraction method based on dual measurement

Huang,

Yuan,

Chen

2024

Meas. Sci. Technol.

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Aiming at the problem that the existing differential confocal measurement (DCM) method lacks the ability to decouple the differential signals from over-range the depth data, which in turn leads to measurement errors, this study proposes a differential confocal effective measurement region extraction method based on dual measurement (D-DCM). The first measurement is a double blur depth measurement, which is a coarse measurement, and the initial acquisition of the depth map is realized by applying a known Gaussian kernel blurring to the focal plane image and calculating the edge gradient ratios between the original image and the blurred image. This depth map is used to determine whether the depth of the measured sample in the field of view is within the differential confocal range and to segment it. The second measurement is a DCM, which is a fine measurement. The effective measurement area of the segmented image is second measured with high precision depth measurement. It is shown by single and multiple step heights experiments that the proposed D-DCM method can effectively solve the problem of decoupling the differential signal from the axial depth in differential confocal.

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Section: Introductionmentioning

confidence: 99%