2006
DOI: 10.1063/1.2374689
|View full text |Cite
|
Sign up to set email alerts
|

Accurate modeling of copper precipitation kinetics including Fermi level dependence

Abstract: Copper is one of the most important contaminants for silicon electronics, and it has detrimental effects on device performance if present in active regions. In this work, the authors investigate copper precipitation models including Fermi level dependence that provide the foundation for simulating copper diffusion and precipitation processes in silicon. These models are verified by comparison to experimental measurements.

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1

Citation Types

1
3
0

Year Published

2013
2013
2018
2018

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 9 publications
(4 citation statements)
references
References 13 publications
1
3
0
Order By: Relevance
“…In essence, the phenomenon resembles that reported by Flink et al 55 and modeled as a precipitation process by Guo and Dunham,59 where the variation of interstitial Cu concentration was shown to have a great impact on the precipitation rate. In this contribution, we additionally consider light-induced effects by taking into account the effect of varying excess carrier concentration on the precipitate charge state and extend the modeling to the minority carrier lifetime level.…”
supporting
confidence: 48%
“…In essence, the phenomenon resembles that reported by Flink et al 55 and modeled as a precipitation process by Guo and Dunham,59 where the variation of interstitial Cu concentration was shown to have a great impact on the precipitation rate. In this contribution, we additionally consider light-induced effects by taking into account the effect of varying excess carrier concentration on the precipitate charge state and extend the modeling to the minority carrier lifetime level.…”
supporting
confidence: 48%
“…Still, interactions between the precipitating species appear important in explaining the smaller measured as-grown distribution. Copper has a large energy barrier to nucleation in silicon, 45 but with co-precipitation a reduction in this barrier may explain the more widespread precipitation seen here in the CuþFe sample relative to the Fe only samples.…”
Section: B Co-contamination Effects (Fe1cu)mentioning
confidence: 89%
“…Possible reasons include either a considerable deviation of the actual precipitate shape from spheres or a sufficient amount of heterogeneous nucleation sites in the studied materials, such as vacancies, dislocations, and/or oxygen precipitate/Si phase boundaries, which minimize the effects of lattice strain. However, with the given total Cu concentration, assuming a strain-minimizing shape such as very thin plates [35][36][37][38] would result in a great increase in precipitate radius and/or density. This would cause a substantial increase in the available recombination surface, decreasing the precipitate-limited lifetime up to several orders of magnitude.…”
Section: E Energetic Parameters and Nucleation Modementioning
confidence: 99%