2008
DOI: 10.1117/12.804682
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Accurate dimensional characterization of periodic structures by spectroscopic Mueller polarimetry

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Cited by 9 publications
(10 citation statements)
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“…5 may provide realistic estimates of the confidence interval giving direct information about the accuracy of the results. The essential conclusion of our work is that the 3D-AFM values mostly fall into the confidence intervals provided by the optical method (tested on 21 different grating boxes), which means that we can estimate the accuracy of our results without using direct comparison with another, non-optical, method [10]. Moreover, this approach may provide a way to improve the accuracy of the grating profile modeling by minimizing the standard deviations evaluated from multiple-azimuths results.…”
Section: Multi-azimuth Spectrally Resolved Mueller Matrix Polarimetrymentioning
confidence: 85%
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“…5 may provide realistic estimates of the confidence interval giving direct information about the accuracy of the results. The essential conclusion of our work is that the 3D-AFM values mostly fall into the confidence intervals provided by the optical method (tested on 21 different grating boxes), which means that we can estimate the accuracy of our results without using direct comparison with another, non-optical, method [10]. Moreover, this approach may provide a way to improve the accuracy of the grating profile modeling by minimizing the standard deviations evaluated from multiple-azimuths results.…”
Section: Multi-azimuth Spectrally Resolved Mueller Matrix Polarimetrymentioning
confidence: 85%
“…In order to improve the correspondence of the model with real gratings, more parameters has to be included (providing more complex profiles). Introducing more profile parameters, on the other hand, negatively influences correlations between parameters and increases dependence of the results on the initial guess [6]. Further statistical analysis of the azimuth-dependent dimensional parameters from Fig.…”
Section: Multi-azimuth Spectrally Resolved Mueller Matrix Polarimetrymentioning
confidence: 98%
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“…The number of free parameters is closely related to the correlations between them: increasing the number of parameters over a certain threshold usually significantly increases their correlations [6], [11]. Increased correlations between parameters complicate optimization process, which may provide significantly higher error estimates, different values of parameters or it can cause the appearance of the new local minima in close proximity to each other.…”
Section: Modelingmentioning
confidence: 98%
“…One possible method to specify the accuracy of the model is to compare and/or combine different measurement configurations. For the gratings considered here, the simplest way to achieve this is to rotate the sample and measure the grating in different, conical, configurations, which provide new and independent information about the structure [5]- [6]. Combination of the multiple measured data within one fit leads to the best estimation of the parameters according to all available data, but again, it does not provide information about the accuracy of the result.…”
Section: Introductionmentioning
confidence: 97%