2010
DOI: 10.1117/12.846234
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Robust characterization of small grating boxes using rotating stage Mueller matrix polarimeter

Abstract: In this paper we demonstrate the robustness of the Mueller matrix polarimetry used in multiple-azimuth configuration. We first demonstrate the efficiency of the method for the characterization of small pitch gratings filling 250 µm wide square boxes. We used a Mueller matrix polarimeter directly installed in the clean room has motorized rotating stage allowing the access to arbitrary conical grating configurations. The projected beam spot size could be reduced to 60x25 µm, but for the measurements reported her… Show more

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