51st ARFTG Conference Digest 1998
DOI: 10.1109/arftg.1998.327296
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Accurate Characteristic Impedance Measurement on Silicon

Abstract: Abstract-This paper presents a new method that accurately determines the characteristic impedance of planar transmission lines printed on lossy dielectrics even when contact-pad capacitance and conductance are large. We demonstrate the method on a coplanar waveguide fabricated on fused silica and a microstrip line fabricated on a highly conductive silicon substrate.

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Cited by 40 publications
(47 citation statements)
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“…In either situation, it is then possible to implement the calibration-comparison method by inserting an impedance transformer to map the reference impedance of the measurement into the reference impedance Z 0 of the multiple, redundant line standards and the following the procedure given in [7][8][9]. Investigations continue to determine if following this approach results in a more accurate characteristic impedance determination.…”
Section: Resultsmentioning
confidence: 97%
See 1 more Smart Citation
“…In either situation, it is then possible to implement the calibration-comparison method by inserting an impedance transformer to map the reference impedance of the measurement into the reference impedance Z 0 of the multiple, redundant line standards and the following the procedure given in [7][8][9]. Investigations continue to determine if following this approach results in a more accurate characteristic impedance determination.…”
Section: Resultsmentioning
confidence: 97%
“…Marks and Williams attribute this difficulty to the electrical discontinuity present at the transmission-line connection and suggest a multiline calibration-comparison method to estimate the characteristic impedance [6,7]. They propose an equivalent-circuit model for the discontinuity that consist of a lossy shunt contactpad with admittance Y followed by an ideal impedance transformer in order to transform the Z 0 of the transmission line to match the impedance of the reference lines used during calibration [8]. Their method, however, encounters difficulties in the presence of parasitic inductance in the transition between the probe tip and the transmission line [9].…”
Section: Introductionmentioning
confidence: 99%
“…The measurement of the through adapters gives two equations, as shown in Eqs. (5) and (6). Therefore, we obtain…”
Section: (B) Symmetric Model For a Single Adaptermentioning
confidence: 92%
“…This approach catches the electrical discontinuity at the connection between pad and transmission lines, but not the series impedance of the vias. In [6], the contact pads (adapters) are modelled as a lossy shunt admittance Y followed by an impedance transformer. In the measurements of devices like bipolar transistors [7] and MOSFETs [8], a three-step method and an improved three-step method are used to de-embed structures such as open, through, short 1, and short 2, respectively.…”
Section: Introductionmentioning
confidence: 99%
“…3 (a) center). An alternative treatment of the error boxes measured by the calibration comparison method was presented in [14], [15]. In this approach, any arbitrary large shunt contact pad capacitance and conductance can be accounted for ( Fig.…”
Section: B Abcd Matrix Based Methodsmentioning
confidence: 99%