2013
DOI: 10.1109/ted.2012.2230004
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Accuracy and Issues of the Spectroscopic Analysis of RTN Traps in Nanoscale MOSFETs

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Cited by 28 publications
(11 citation statements)
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“…6, the X T values obtained by means of (7) are shown. Although this equation is only valid for single oxide layers (and not for stacks), it is derived in the inversion regime, and it is inaccurate due to statistical variability [25], [26]; we consider that it can still provide some remarkable but only qualitative insights about the differences between nFETs and pFETs. As shown in Fig.…”
Section: Bias Dependence Of Capturementioning
confidence: 99%
“…6, the X T values obtained by means of (7) are shown. Although this equation is only valid for single oxide layers (and not for stacks), it is derived in the inversion regime, and it is inaccurate due to statistical variability [25], [26]; we consider that it can still provide some remarkable but only qualitative insights about the differences between nFETs and pFETs. As shown in Fig.…”
Section: Bias Dependence Of Capturementioning
confidence: 99%
“…The traps are located 3.3 eV below the oxide conduction band. The test device is a square, n-channel, bulk MOSFET with a 25 nm physical gate length, 1.2 nm SiO 2 gate oxide, and halo implants [15].…”
Section: Simulation Methodologymentioning
confidence: 99%
“…The original approach in [122] relied on the classical theory of direct tunneling into oxide defects [80,81], explicitly linking τ c and τ e to the space and energy position of the trap inside the oxide. Later results have, however, shown that capture/emission times in MOSFETs are not compatible with such a description [143,144], due to device variability effects on the time constants [145][146][147] and structural relaxation of defects [140,148], generating a large spread in time constants even for traps located close to the silicon/oxide interface and disrupting the classical correlation between τ c and τ e . The study of the microscopic properties of RTN traps is still an active research topic [149][150][151][152][153][154][155][156], but for our purposes we will adopt a pragmatic approach, assuming given distributions of capture/emission time constants that may be consistent with observations, without linking them to any particular trap location.…”
Section: Modelsmentioning
confidence: 99%