Accelerometer systems with built-in testing

Allen, Henry V.; Terry, S.C.; Bruin, Diederik W. de

doi:10.1016/0924-4247(90)85076-g

Cited by 21 publications

(3 citation statements)

References 2 publications

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“…As figure 1 depicts, a rectangular hole on this wafer is formed to the familiar (111)-faced, pyramid-shaped pit. Equation (1) shows the depth h of the V-groove varies with the hole width w by a fixed ratio.…”

Section: The V-groove Depth Rulersmentioning

confidence: 99%

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A method using V-grooves to monitor the thickness of silicon membrane with m resolution

Chang

Yang

1998

J. Micromech. Microeng.

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This article presents a method capable of easily identifying the membrane thickness of micro-sensors by a V-groove depth ruler that has been made in advance on silicon wafers before sensor fabrication. The proposed method not only provides a viable alternative to other etch-stop techniques, but can also be used as an in situ tool for depth or thickness monitoring with micrometer resolution. Without p+ diffusion or an n-epitaxial layer on silicon substrates, the batch processing capability of silicon piezoresisitve micro-sensors can be preserved with V-grooves. Furthermore, the method proposed herein could also calibrate the etching rate of anisotropic etching solutions, check the uniformity of pressure sensors and offer guidelines on how to further improve the batch process of silicon bulk micro-machining. Moreover, a revised shape of V-groove depth ruler with self-alignment capability is also proposed herein.

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Section: The V-groove Depth Rulersmentioning

confidence: 99%

“…How to improve the linearity and sensitivity of sensors is a relevant issue for pressure sensors and accelerometers [1]. On one hand, adding a stiffened boss on the membrane can modify linearity.…”

Section: Introductionmentioning

confidence: 99%

A method using V-grooves to monitor the thickness of silicon membrane with m resolution

Chang

Yang

1998

J. Micromech. Microeng.

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“…In recent years there has been growing commercialisation of the simpler silicon micromachined devices, such s pressure sensors and acceleration sensors [1,2]. A new field of application of micromachining technology is microinstrumentation, especially regarding chemical and biomedical analysis.…”

Section: Introductionmentioning

confidence: 99%

Chemical and Biochemical Microsensors in Silicon for the Clinical on-Line Monitoring

Scheipers

Hinkers²,

Wassmus³

et al. 2002

Biomedizinische Technik/Biomedical Engineering

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Miniaturised chemosensors and biosensors for applications in clinical diagnostics and biomedical fields can be fabricated in silicon with high reproducibility using the containment technology. They are characterised by excellent durability of the sensitive membranes. Meanwhile, there are sensors available for a variety of relevant medically parameters such as pH, the blood electrolytes sodium, calcium, potassium, and the blood metabolites glucose and lactate. The miniaturised sensors provide the opportunity to develop product solutions with minimal sampling volume requirements for the "Point of Care (POC)" sector through the combination of innovative microtechnical components. Two examples are presented, such microsystems have been implemented for the medical applications of "Blood Monitoring" and "Glucose Monitoring".

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Sensors for Measuring Acceleration

Esashi

1995

Sensors Set

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Accelerometer systems with built-in testing

Cited by 21 publications

References 2 publications

A method using V-grooves to monitor the thickness of silicon membrane with m resolution

A method using V-grooves to monitor the thickness of silicon membrane with m resolution

Chemical and Biochemical Microsensors in Silicon for the Clinical on-Line Monitoring

Sensors for Measuring Acceleration

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