AC stress analysis of trench-based multi-gate transistors in a 40 nm e-NVM technology

Gay, R.; Marca, V. Della; Aziza, Hassen; Chiquet, P.; Régnier, A.; Niel, S.; Marzaki, A.

doi:10.1016/j.microrel.2022.114732

Microelectronics Reliability

2022

DOI: 10.1016/j.microrel.2022.114732

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AC stress analysis of trench-based multi-gate transistors in a 40 nm e-NVM technology

R. Gay

V. Della Marca

Hassen Aziza

et al.

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AC stress analysis of trench-based multi-gate transistors in a 40 nm e-NVM technology

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References 21 publications

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