Ablation of Submicrometer Holes Using an Extreme-Ultraviolet Laser

Rossall, A. K.; Aslanyan, V.; Tallents, G. J.; Kuznetsov, Ilya; Rocca, J. J.; Menoni, Carmen S.

doi:10.1103/physrevapplied.3.064013

Cited by 27 publications

(21 citation statements)

References 29 publications

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“…The early-time evolution of the LIPs of interest was thus investigated using a two-dimensional (2-D) Eulerian radiative hydrodynamic code, POLLUX. [18][19][20] This code, which has been used in previous simulations of the interaction of laser radiation with a solid target and the subsequent expansion of a LIP, [29][30][31] solves the three first-order quasilinear partial differential equations of hydrodynamic flow. The POLLUX calculations assume cylindrical symmetry, with the target and the region above the surface represented by a 2-D (z, r) mesh, where z and r define, respectively, an axis along the target surface normal and the radial coordinate orthogonal to z (with r = 0 set at the centre of the laser spot on the target).…”

Section: Experimental and Modellingmentioning

confidence: 99%

Wavelength-dependent variations of the electron characteristics in laser-induced plasmas: A combined hydrodynamic and adiabatic expansion modelling and time-gated, optical emission imaging study

Liu

Ashfold

Meehan

et al. 2019

Journal of Applied Physics

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The spatial and temporal evolution of the absolute electron densities and temperatures in plasmas formed by nanosecond pulsed laser ablation of silicon in vacuum at two wavelengths (1064 and 532 nm), at similar irradiances, have been explored by complementary simulation (using combined hydrodynamic and adiabatic models) and experiment. Modelling the laser-target and laser-plume interactions with the POLLUX code reveals the evolving composition and dynamics of the laser induced plasma (LIP) during the incident laser pulse: 532 nm irradiation causes more ablation, but the LIP formed by 1064 nm excitation has a higher average charge state and expands faster. The experimental data, from the analysis of Stark broadened line shapes of SiIII and SiIV cations in time-gated, position- and wavelength-resolved images of the plume emission, allow characterisation of the plume dynamics at later times. These dynamics are compared with predictions from two forms of adiabatic expansion model. Both take as input parameters the plume properties returned by the POLLUX simulations for the end of the laser pulse, but differ according to whether the initial plasma is assumed isothermal or isentropic. The study illustrates the important λ-dependences of the target absorption coefficient (in establishing the ablated material density) and of electron–ion inverse bremsstrahlung absorption (in coupling laser radiation into the emergent plasma); the extents to which these interactions, the relative ablation yields, and the plume expansion dynamics depend on λ; and the importance of identifying appropriate initial conditions for adiabatic expansion modelling of LIP in vacuum.

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Section: Experimental and Modellingmentioning

confidence: 99%

Wavelength-dependent variations of the electron characteristics in laser-induced plasmas: A combined hydrodynamic and adiabatic expansion modelling and time-gated, optical emission imaging study

Liu

Ashfold

Meehan

et al. 2019

Journal of Applied Physics

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“…For plasmas, the distribution of ions is modelled by local thermodynamic equilibrium (LTE) including ionization potential depression and used to calculate the opacity due to photoionization and inverse bremsstrahlung. 25,26 Ablation of solid-density material by EUV radiation creates a low-density plume of plasma expanding in the direction of the laser and (more slowly) laterally. For intensities considered in this paper, the plasma density drops approximately exponentially along the laser axis.…”

Section: Target Hydrodynamicsmentioning

confidence: 99%

Ablation and transmission of thin solid targets irradiated by intense extreme ultraviolet laser radiation

et al. 2016

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The interaction of an extreme ultraviolet (EUV) laser beam with a parylene foil was studied by experiments and simulation. A single EUV laser pulse of nanosecond duration focused to an intensity of 3 × 1010 W cm−2 perforated micrometer thick targets. The same laser pulse was simultaneously used to diagnose the interaction by a transmission measurement. A combination of 2-dimensional radiation-hydrodynamic and diffraction calculations was used to model the ablation, leading to good agreement with experiment. This theoretical approach allows predictive modelling of the interaction with matter of intense EUV beams over a broad range of parameters.

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“…We investigate different focusing arrangements to ablate solid targets. The direct ablation of solid targets with short wavelength laser light may have applications in the manufacture of micro electro-mechanical systems (MEMS) [13] and the plasmas produced have interesting properties as they are typically of high solid density, but low temperature (< 10 eV). Such plasmas are referred to as 'warm dense matter' and are relevant to the physics of the interiors of large planets and to laser fusion [14].…”

Section: Introductionmentioning

confidence: 99%

Extreme ultraviolet laser ablation of solid targets

Tallents

Wilson

Lolley

et al. 2019

X-Ray Lasers and Coherent X-Ray Sources: Development and Applications XIII

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A capillary laser with output in the extreme ultraviolet at wavelength 46.9 nm is used to ablate solid targets of parylene-N (CH), PMMA, aluminum and gold. We summarize results obtained using different focusing optics: a Fresnel zone plate, an off-axis spherical multi-layer mirror and on-axis multi-layer and gold mirrors. The Fresnel zone plate has a small aperture and focuses a small fraction of the laser energy to a small diameter (< 1 µm) with peak intensities 6 x 10 9 Wcm-2. The off-axis spherical multi-layer mirror allows for a measurement of the transmission of the laser through thin targets, but the off-axis geometry produced an aberrated focus. The on-axis multi-layer mirror allows focusing to intensities of approximately 5 x 10 10 Wcm-2 with a cylindrically symmetric focus.

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Ablation of Submicrometer Holes Using an Extreme-Ultraviolet Laser

Cited by 27 publications

References 29 publications

Wavelength-dependent variations of the electron characteristics in laser-induced plasmas: A combined hydrodynamic and adiabatic expansion modelling and time-gated, optical emission imaging study

Wavelength-dependent variations of the electron characteristics in laser-induced plasmas: A combined hydrodynamic and adiabatic expansion modelling and time-gated, optical emission imaging study

Ablation and transmission of thin solid targets irradiated by intense extreme ultraviolet laser radiation

Extreme ultraviolet laser ablation of solid targets

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