Ablation induced by single-and multiple-femtosecond laser pulses in lithium niobate

Chen, H.; Chen, X.; Zhang, Yuxiang; Xia, Yuxing

doi:10.1134/s1054660x07120079

Cited by 23 publications

(9 citation statements)

References 19 publications

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“…Chen et al [140] reported the dependence of ablation threshold on the number of laser pulses for the micromachining of lithium niobate, a widely used photonic crystal. Fs laser at the pulse duration of 80 fs, with a 800-nm wavelength, and a repetition rate of 1 kHz was used for the micromachining.…”

Section: Ceramicsmentioning

confidence: 99%

Laser Beam MicroMachining (LBMM) – A review

Mishra¹,

Yadava

2015

Optics and Lasers in Engineering

227

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Section: Ceramicsmentioning

confidence: 99%

Laser Beam MicroMachining (LBMM) – A review

Mishra¹,

Yadava

2015

Optics and Lasers in Engineering

227

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“…Korte et al 11 studied the femtosecond laser pulse train ablation of chrome by scanning electron microscope and achieved subdiffraction limited structures. Chen et al 12 explored the femtosecond laser pulse train ablation lithium niobate and found a significant decrease in the ablation threshold as pulse number increased. Vorobyev and Guo 13 studied the femtosecond laser pulse train ablation of gold by laser calorimetry technique and found a significant enhancement in laser light absorption.…”

Section: Introductionmentioning

confidence: 99%

Phase change mechanisms during femtosecond laser pulse train ablation of nickel thin films

Li¹,

Jiang²,

Tsai³

2009

Journal of Applied Physics

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The mechanisms of nickel thin films irradiated by femtosecond laser pulse trains are studied by a model using molecular dynamics simulations and two-temperature model. It is found that the pulse train technology can change energy transport and corresponding phase change processes. Compared with single pulse ablation at the same total fluence, the pulse trains lead to ͑1͒ lower ablation rate with more and smaller uniform nanoparticles, ͑2͒ higher film surface temperatures and longer thermalization time, ͑3͒ much lower electron thermal conductivity that can further control heat-affected zone, ͑4͒ significantly smaller film compressive stresses and tensile stresses which reduce microcracks, and ͑5͒ a transition from phase explosion to the critical point phase separation which favors small uniform nanoparticle generation.

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“…In order to improve processing precision and surface roughness, ultrafast laser machining in LiNbO 3 has been studied intensively in recent years [7][8][9][10][11][12]. Chen et al measured the surface-ablation threshold of LiNbO 3 , which decreases significantly along with an increase of the pulse number, until reaching a constant level due to an incubation effect [10]. Fissi et al reported that the micromachining rate strongly depends on the operating parameters, such as laser power, scanning speed, and scanning number.…”

Section: Introductionmentioning

confidence: 99%

Good-Quality and High-Efficiency Dicing for Thick LiNbO3 Wafers Using Picosecond Laser Pulses

Lei

Gao

et al. 2019

Micromachines

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Lithium niobate (LiNbO3) has become popular with applications in electronics and communication industries due to its excellent electro-optical and nonlinear properties. This paper presents the influence of laser power, repetition frequency, number of subpulses, depth of each pass, and scanning velocity in picosecond laser dicing on multiple characteristics of LiNbO3 using the Taguchi method. By means of analysis of variance and analysis of relations between the characteristics, the optimal ps-laser-dicing parameter is obtained with good quality and high efficiency, which is applied to LiNbO3 products. The result indicates that picosecond laser dicing provides an alternative to machine thick LiNbO3 wafers with narrow kerf width, micro chipping, smooth surface, and high productivity.

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Ablation induced by single-and multiple-femtosecond laser pulses in lithium niobate

Cited by 23 publications

References 19 publications

Laser Beam MicroMachining (LBMM) – A review

Laser Beam MicroMachining (LBMM) – A review

Phase change mechanisms during femtosecond laser pulse train ablation of nickel thin films

Good-Quality and High-Efficiency Dicing for Thick LiNbO3 Wafers Using Picosecond Laser Pulses

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