Abatement of perfluorocompounds (PFCs) in a microwave tubular reactor using O/sub 2/ as an additive gas

Adsorption equilibrium of sulfur hexafluoride on multi-walled carbon nanotubes

“…In addition, SF 6 is also a common tracer gas for use in experiments or oceanography. But according to the Intergovernmental Panel on Climate Change, SF 6 is the most potent greenhouse gas with a global warming potential of 23,900 times that of CO 2 when compared over a 100-year period [2]. Due to the large amount produced annually and its long atmospheric lifetime (∼3200 years), the use of SF 6 has recently become a global environmental issue.…”

Formation of fluorine for abating sulfur hexafluoride in an atmospheric-pressure plasma environment

“…The emission of SF 6 from the semiconductor manufacturing process has recently increased greatly along with the output value of the semiconductor industry. However, SF 6 has a long lifetime in the atmosphere (∼3200 years), with a high global warming potential which is about 23,900 times higher than CO 2 [1].…”

Thermal Plasma Decomposition of Fluorinated Greenhouse Gases

“…An attempt was made to use low pressure plasmas to decompose unused fluorinated gases effectively in the process chamber of semiconductor manufacturing [9][10][11][12][13] because process gases are diluted with large amounts of nitrogen which is used to purge away particulates from an exhaust pipe [13,14]. The foreline treatment, however, causes side effects on the semiconductor manufacturing process due to a back streaming of undesirable materials.…”