Formation of fluorine for abating sulfur hexafluoride in an atmospheric-pressure plasma environment

Adsorption equilibrium of sulfur hexafluoride on multi-walled carbon nanotubes

“…Because the process/equipment and material modifications are not currently practical, add-on-control approaches are the most available and cost-effective methods at present. Several studies have addressed the abatement/destruction methods such as thermal destruction [3], catalytic decomposition [4], plasma abatement [5], electrochemical reduction [6], photodegradation [7,8] and other advanced or combined abatement processes [9]. However, all of these are very costly and by-products emitted from some methods are harmful to human health and the environment [10].…”

Photodegradation of SF6 on polyisoprene surface: Implication on elimination of toxic byproducts

“…The degradation of SF 6 had been achieved utilizing combustion, chemical-thermal catalysis and plasma methods [5][6][7], yet these technologies suffer either from high energy consumption or from the yield of especially toxic byproducts such as SF 4 , SF 2 , S 2 F 10 , SOF 2 , SOF 4 , SOF 10 , SO 2 F 2 , S 2 O 2 F 10 , HF and H 2 S [8,9]. Therefore an economically feasible approach that can eliminate SF 6 molecules effectively and generate less toxic products needs to be developed.…”

Surface Characterization of Argon/Methane Mixture Atmospheric-Pressure Plasma-Treated Filtration Poly(Vinylidene Fluoride) Membrane and Its Flux Enhancement

“…Regardless of the admirable modification effectiveness, the available plasma techniques for surface treatment are mostly restricted to the plasma reactor volume and the vacuum/chemical cycles. To overcome the limitations, atmospheric-pressure plasma technique is the potential candidate for surface modification [8]- [13]. The plasma techniques at atmospheric pressure obtained several benefits such as vacuum free, chamberless surface treatment, and dry process.…”