A wide range constant-resistance Pirani gauge with ambient temperature compensation

Enhanced Sensitivity of the Pirani Vacuum Gauge by the AC Driving Method

“…The curve in Fig. 2 possesses similar aspects that can be found in the constant-current driving method [8], and is measured through the bridge. Therefore, the offsets voltage (1.8V ac ) results from resistance in the opposite arm of the bridge circuit.…”

THE CHEMISTRY OF THE B3–B9BORON HYDRIDES

“…With the increased heat transfer to the walls at these pressures, wall temperature compensation of the type already discussed earlier by English et al (1965) is even more important than for gauges of more limited pressure range. The large thermal mass of'cooling fins as in the gauge by Heinje and Vink (1969) would appear to be a distinct disadvantage, since large thermal lags and memory effects would be expected to occur when the gauge has been operating for some time at a high pressure and is suddenly exposed to a low pressure or vice-versa.…”

An Ultra-Compact MEMS Pirani Sensor for In-Situ Pressure Distribution Monitoring

“…Hence, measuring heat dissipation is an indirect method of measuring a vacuum. Traditional Pirani vacuum sensors have underwent years of development and have been used in diverse fields [ 7 , 8 , 9 ]; however, they are also subject to constraints, such as high cost and a large size, and they are difficult to mass-produce. The state of the art and development of microelectromechanical system (MEMS) technologies have revolutionized various industries, especially vacuum sensor technology [ 10 , 11 , 12 ].…”