A Warped-Cantilever MEMS MOS Gas Sensor Array

Strategic report on MEMS based carbon monoxide sensor technology for environmental air quality monitoring using unmanned aerial vehicle

“…MOx semiconductor with a wrapped-cantilever was used to design gas sensor array and doped SiO 2 material was used to make cantilever for gas sensor. The static power consumption was observed by the researcher was about 5.81 mW [106]. CMOS MEMS technology was used and parylene-C coating was used to develop a gas sensor, the observed sensitivity of the gas sensor was about 171 mV/ (m/s) V and the power consumption was 18.3 mW [107].…”