TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference 2007
DOI: 10.1109/sensor.2007.4300612
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A Virtual Impactor for Hydrodynamic Particle Classification

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Cited by 5 publications
(5 citation statements)
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“…Other micromachined VIs were also reported. Kim et al [22] fabricated such a micro-VI using bulk micromachining, with an injection nozzle 156 μm wide and a channel more than 200 μm deep whose design cut-off particle diameter was initially set as 10 μm. However, this was a passive hydrodynamic particle sorter for classifying biochemical components in liquid media, not for airborne particles.…”
Section: Particle Separation Methodsmentioning
confidence: 99%
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“…Other micromachined VIs were also reported. Kim et al [22] fabricated such a micro-VI using bulk micromachining, with an injection nozzle 156 μm wide and a channel more than 200 μm deep whose design cut-off particle diameter was initially set as 10 μm. However, this was a passive hydrodynamic particle sorter for classifying biochemical components in liquid media, not for airborne particles.…”
Section: Particle Separation Methodsmentioning
confidence: 99%
“…For particles with a diameter of 10 μm (for which the collection efficiency should be 50%) the measured collection efficiency was 68%. The authors attributed this discrepancy to the fact that the actual particle diameters were larger than 10 μm [22].…”
Section: Particle Separation Methodsmentioning
confidence: 99%
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“…Stk50 is adopted as a design rule, for which the Stokes number collection efficiency is 50%. The value 0.23 is recommended for square channels [27]. The virtual impactor was designed based on a trial-anderror process using the following procedure: (1) determination of the target cut-off diameter (d p ), flow velocity (U), channel thickness (t) and Stokes number; (2) calculation of W using equations (3)-( 5) and (3) verification of Re to determine if the resulting flow is within the laminar regime (<1000), using equation ( 6):…”
Section: Design Of the Virtual Impactormentioning
confidence: 99%