A view to the future-a modular simulation kit for cost-efficient fab-wide planning and the simulation of automated material handling systems in the semiconductor industry

Bader, U.; Besler, A.; Schließer, Jochen; Dorner, Johann

doi:10.1109/asmc.1999.798193

Cited by 3 publications

(2 citation statements)

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“…Looking for flexible and reasonably priced production, intelligent material flow and transport concepts (push and pull strategies), as well as appropriate simulation technology become an increasingly important aid in factory planning [3]. Especially in the planning phase, this comparatively inexpensive experimentation field provides a detailed reproduction of the production environment.…”

Section: Simulationmentioning

confidence: 99%

Issues for Automation in Semiconductor Manufacturing

Glüer¹

2002

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This survey sketches the importance of Automatic Control Engineering with all its flavors for state-of-the-art semiconductor manufacturing. Many automation disciplines are required for maximization of production yield, high throughput, low delivery times and little lateness. Tools for accomplishing these goals are hybrid dynamic modeling, advanced simulation and scheduling techniques, complex robustness calculations and comprehensive performance monitoring and justification methods.

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Section: Simulationmentioning

confidence: 99%

Issues for Automation in Semiconductor Manufacturing

Glüer¹

2002

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“…The integrated model captured the constraining interactions of process and material handling, and was used by a 200 mm wafer fab for process planning and material handling analysis. Bader, Besler, Schliesser, and Dorner (1999) described a modular simulation kit for planning and modeling fab-wide automation systems. Campbell, Wright, Cheatham, Schulz, and Berry (2000) reported the generic simulation modeling of a 300 mm factory to examine operational issues that were associated with fully automated 300 mm wafer manufacturing.…”

Section: Relevant Literaturementioning

confidence: 99%