Abstract:Abstract. Advances in micromachining have led to the development of microelectromechanical systems (MEMS) devices with suspended structures used in a variety of sensors. Of note for this work are sensor types where two elements exist on the suspended membrane, including examples like air flow and differential pressure detectors, gas detection, and differential scanning calorimetry sensors. Intuitively one would argue that some thermal loss exists between the two elements. However, surprisingly little is docume… Show more
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