A two-dimensional high-frequency electrostatic microscanner

Liu, Yaobo; Yuan, Weizheng; Qiao, Deli; Wu, Mengjuan; Yang, X.; Lian, Bin

doi:10.3788/col201311.112302

Cited by 2 publications

(1 citation statement)

References 3 publications

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“…1a, the two axis of the gimbaled scanner each have their own actuators. In order to insulate the two electrodes of the inner actuators located on the frame from each other, a high level of fabrication processes, for example, the etching and refilling of high aspect ratio insulation trench 23,24 , the combination of the surfaceand the bulk-micromachining techniques 25 , the suspended substrate 26 , flip-chip bonding and fusion bonding of one SOI wafer and three silicon wafers 27 , and so on, is required. To overcome respective shortcomings of gimbal-less and gimbaled structures, a pseudo-gimbal-less 2D electrostatic scanner with four identical comb-drive actuators is proposed.…”

Section: Introductionmentioning

confidence: 99%

Portable confocal-controlled LIBS microscopy based on MEMS mirror scanning

Wang,

Peng,

Cui

et al. 2023

Optoelectronic Imaging and Multimedia Technology X

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Miniaturized two-dimensional scanning mirror based on microelectromechanical systems (MEMS) technology has great potential in automotive industry, consumer electronics, and biomedicine, etc. Due to its high frequency and large angle, resonant scanning is the mainstream in all MEMS actuation mechanisms, such as harmonic resonant electromagnetic scanner and parametric resonant electrostatic scanner.Although electrostatic scanner has the advantages of low power consumption and IC process compatibility, some shortcomings of parametric resonance, including double frequency of driver electronics and additional feedback control or frequency stabilization system, limit its further application. The symmetry of coplanar electrostatic comb actuator is broken in this paper, and harmonic resonant electrostatic scanner with excellent performance is realized. Further, through adopting mechanical filter, two-dimensional scanning can be achieved through one set of actuators, which avoids the problem that two sets (each for one dimension) of electrostatic actuators must be insulated each other through complicated and expensive processes. A two-2 dimensional MEMS scanner based on symmetry breaking and mechanical filter was proposed and demonstrated. Multiple scanning modes can be achieved through selective control of a set of four identical actuators.

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Section: Introductionmentioning

confidence: 99%

Portable confocal-controlled LIBS microscopy based on MEMS mirror scanning

Wang,

Peng,

Cui

et al. 2023

Optoelectronic Imaging and Multimedia Technology X

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Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning

Wang

Zhuang

et al. 2021

Micromachines

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Microelectromechanical System (MEMS)-based scanning mirrors are important optical devices that have been employed in many fields as a low-cost and miniaturized solution. In recent years, the rapid development of Light Detection and Ranging (LiDAR) has led to opportunities and challenges for MEMS scanners. In this work, we propose a 2D electrostatically actuated micro raster scanner with relatively large aperture. The 2D scanner combines a resonant scanning axis driven by an in-plane comb and a quasistatic scanning axis driven by a vertical comb, which is achieved by raising the moving comb finger above the fixed comb finger through the residual stress gradient. The analytic formula for the resonant axis frequency, based on the mechanical coupling of two oscillation modes, is derived and compared with finite element simulation. A prototype is designed, fabricated, and tested, and an overall optical Field-of-View (FoV) of about 60° × 4° is achieved. Finally, some possibilities for further improvement or optimization are discussed.

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A two-dimensional high-frequency electrostatic microscanner

Cited by 2 publications

References 3 publications

Portable confocal-controlled LIBS microscopy based on MEMS mirror scanning

Portable confocal-controlled LIBS microscopy based on MEMS mirror scanning

Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning

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