A two-dimensional f-.THETA. micro optical lens scanner with electrostatic comb-drive XY-stage

Abstract

Abstract:We report the design, fabrication and electromechanical performance of a newly developed micro electromechanical XYscanner for micro-optical spatial light modulation using the silicon micromachining technology. A two-dimensional stage is integrated with a silicon micro lens to scan a transmitting infrared light of 1.55-micronwavelength by the mechanism of the f -θ lens scanner. Mechanical displacement of up to ±10 microns (optical angle of ±0.57 degrees) was obtained with a drive voltage of 30 V; optical simulation has suggested that the scanner can be used to construct a free-space optical crossconnect of 9-input by 9-output port counts.

A high fill-factor comb-driven XY-stage with topological layer switch architecture

“…Micro XY-stages are used for scanning probe microscopy (SPM) based data storage devices [1] and microlens optical scanners [2,3,4]. The SPM based data storage device is expected to have high recording density of over 1 Tbit/in 2 , and the micro XY-stage is used to scan and position the recording media at the atomic-scale resolution with respect to the probe tips.…”

“…Various types of mechanisms have been proposed to realize such XY-stages with the microelectromechanical system (MEMS) technology to meet the requirement of fast positioning response, high precision, and small device size. XY-stages are also used to laterally displace a micro optical lens and to compose an optical MEMS device such as a microscope [2] and fiber optic crossconnect (OXC) [3,4].…”

“…Driving mechanisms of MEMS XY-stages are, for example, electrostatic [2,3,4,5], electromagnetic [1,6], and piezoelectric [7]. Electrostatic actuators in general have advantages to others in terms of effective force scalability into the micron range, low power consumption, compatibility with the CMOS processes, and device simplicity that only requires two separate electrodes.…”

“…Electrostatic actuators in general have advantages to others in terms of effective force scalability into the micron range, low power consumption, compatibility with the CMOS processes, and device simplicity that only requires two separate electrodes. However, most conventional XY-stages (including our previous model) have poor fill-factor because they were designed to accommodate the mechanical structures (suspensions and electrodes) all in a single layer [2,3,4,5].…”

“…However, the design cannot be used for, for instance, the micro lens scanner [3] because the optical path through the stage would be optically interrupted by the hidden mechanisms. Different from their work, the newly developed structure uses the bottom part of a silicon-on-insulator (SOI) wafer for the suspension and the top silicon layer for the electrostatic drive mechanism [9], by which a relatively large open space is left for multi purpose.…”