A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator

Tian, Feng; Zhou, Guangyong; Chau, Fook Siong; Deng, Jie; Ramam, A.; Tang, Xiaosong; Teo, Siew Lang; Loke, Yee Chong

doi:10.1117/12.2005606

Cited by 1 publication

(2 citation statements)

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“…devices such as nano-actuators [9][10][11][12][13], nano-switches [14,15] and nano-resonators [16,17], etc., are pushed to compete unswervingly with the well-known complementary metal-oxide-semiconductor (CMOS) transistors in performance, the adoption of the single-nanostructure architectures will potentially facilitate the highest levels of performance, although this will also involve overcoming enormous scientific and technological challenges. In this regard, there are plenty of attempts to investigate the feasibility of building tiny systems with large-stroke and possibly having nano-scale resolutions.…”

Section: Pull-in Instability Control For Desired Characteristics In Mmentioning

confidence: 99%

“…Tian at el. [11] demonstrated a novel splitladder photonic crystal cavity, which can be tuned across a very large wavelength range by an on-chip integrated NEMS actuator. Lambrecht et al [12] designed and fabricated a shape memory alloy-based NEMS silicon actuator functional as optical ultra-small footprint switching.…”

Section: Pull-in Instability Control For Desired Characteristics In Mmentioning

confidence: 99%

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Pull-in-free design of electrically actuated carbon nanotube-based NEMS actuator assuming non-parallel electrodes arrangement

Ouakad

2018

J Braz. Soc. Mech. Sci. Eng.

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In this numerical investigation, the nonlinear structural response of an electrostatic carbon nanotube (CNT) based nanoactuator assuming a non-parallel (out-of-plane) plates actuation configuration is examined. The actuating force is initiated by the asymmetry of the resultant electric fringing-fields caused mainly due to the non-parallel electrodes scheme. The nano-actuator is designed based on a carbon nanotube flexible moving electrode and two symmetrically located actuating stationary rectangular-shaped out-of-plane electrodes. First, the electrical problem of the nano-actuator is numerically solved to acquire the resultant actuating force. The force is then mathematically approximated from the outcomes of a 2D numerical solution of the electric problem via a finite-element-based numerical analysis. Then, the structural behavior of the CNT-based nano-actuator under the effect the resultant non-parallel electric fields is investigated numerically via a modal expansion process. The electro-mechanical model was constructed based on an Euler-Bernoulli continuous nonlinear beam model, where both the mid-plane stretching (geometric nonlinearity) and the electric non-parallel fringingfields effects have been taken into consideration. The reduced-order model (ROM) was derived using the Galerkin decomposition via modal decomposition process. The resultant nonlinear equations are solved numerically to get the static response of the considered CNT-based nano-actuator for various DC voltages. The eigenvalue problem is afterward derived and studied to get the variation of the fundamental as well as higher-order natural frequencies when the system is deflected by a non-zero DC amplitude. A detailed parametric study indicates an opportunity of having larger stroke as well as higher fundamental natural frequency for such CNT-based nano-actuator function of the assumed DC voltage amplitude, enabling it to be used as a tunable NEMS-based device without any pull-in scenario.

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Section: Pull-in Instability Control For Desired Characteristics In Mmentioning

confidence: 99%

Section: Pull-in Instability Control For Desired Characteristics In Mmentioning

confidence: 99%

Pull-in-free design of electrically actuated carbon nanotube-based NEMS actuator assuming non-parallel electrodes arrangement

Ouakad

2018

J Braz. Soc. Mech. Sci. Eng.

View full text Add to dashboard Cite

show abstract

A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator

Cited by 1 publication

References 0 publications

Pull-in-free design of electrically actuated carbon nanotube-based NEMS actuator assuming non-parallel electrodes arrangement

Pull-in-free design of electrically actuated carbon nanotube-based NEMS actuator assuming non-parallel electrodes arrangement

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