A Tribological Study of Multiply-Alkylated Cyclopentanes and Perfluoropolyether Lubricants for Application to Si-MEMS Devices

Leong, Jonathan Y.; Satyanarayana, N.; Sinha, Sujeet K.

doi:10.1007/s11249-013-0112-3

Cited by 12 publications

(3 citation statements)

References 26 publications

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“…Liquid lubricants are frequently used in space mechanisms because they are associated with low mechanical noise, no wear in the elastohydrodynamic regime, ease of replenishment, ability to remove wear debris, and insensitivity to environmental factors. , Friction and wear behaviors of space lubricants are vital under boundary lubrication condition for reliability and longevity of space mechanisms. Multialkylated cyclopentanes (MACs), a class of synthetic hydrocarbon fluids are gaining an acceptance on actual space hardware due to the good chemical inertness, excellent viscosity properties, low volatility, low pour points and high thermal stability, which is one of the well-known liquid lubricants for space applications. , Some reports concerning the evaluation of MACs under laboratory conditions have shown that MACs possess good lubrication performance under vacuum, , whereas the same lubricity cannot be promised under more severe environmental conditions, such as high/low temperature (HT/LT), atomic oxygen (AO), ultraviolet (UV), proton (PR), and electron (EL) irradiation, absence of a gravitational field, and so on. ,, Hence, it is essential to use suitable lubricant additives to obtain the desired performance of MACs for mechanical systems under harsh conditions.…”

Section: Introductionmentioning

confidence: 99%

Improving Tribological Properties of Multialkylated Cyclopentanes under Simulated Space Environment: Two Feasible Approaches

Fan

Wang

et al. 2015

ACS Appl. Mater. Interfaces

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Space mechanisms require multialkylated cyclopentanes (MACs) more lubricious, more reliable, more durable, and better adaptive to harsh space environments. In this study, two kinds of additives were added into MACs for improving the tribological properties under simulated space environments: (a) solid nanoparticles (tungsten disulfide (WS2), tungsten trioxide (WO3), lanthanum oxide (La2O3), and lanthanum trifluoride (LaF3)) for steel/steel contacts; (b) liquid additives like zinc dialkyldithiophosphate (ZDDP) and molybdenum dialkyldithiocarbamate (MoDTC) for steel/steel and steel/diamond-like carbon (DLC) contacts. The results show that, under harsh simulated space environments, addition of the solid nanoparticles into MACs allows the wear to be reduced by up to one order magnitude, while liquid additives simultaneously reduce friction and wear by 80% and 93%, respectively. Friction mechanisms were proposed according to surface/interface analysis techniques, such as X-ray photoelectron spectroscopy (XPS) and time-of-flight secondary ion mass spectroscopy (TOF-SIMS). The role of solid nanoparticles in reducing friction and wear mainly depends on their surface enhancement effect, and the liquid additives are attributed to the formation of tribochemical reaction film derived from ZDDP and MoDTC on the sliding surfaces.

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Section: Introductionmentioning

confidence: 99%

Improving Tribological Properties of Multialkylated Cyclopentanes under Simulated Space Environment: Two Feasible Approaches

Fan

Wang

et al. 2015

ACS Appl. Mater. Interfaces

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“…In this work, multiply alkylated cyclopentanes (MACs) are used as the base oil due to their impressive properties including chemical inertness, thermal stability, tribological properties, and so forth [ 24 , 25 , 26 ]. The ECR and tribological properties of CNTs, multilayer graphene (MG), and Ag in MACs are investigated under different loads and currents.…”

Section: Introductionmentioning

confidence: 99%

Probing the Conductive and Tribological Behaviors of Solid Additives in Multiply Alkylated Cyclopentanes for Sliding Electrical Contact

Cao

Shi

et al. 2022

Nanomaterials

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Sliding electrical contacts need to be lubricated by conductive lubricants to perform low energy dissipation, high reliability, and long service life. This work studied the thermal stability, anti-corrosion capacity, and conductive, and tribological behaviors of several solid additives in multiply alkylated cyclopentanes (MACs), including carbon nanotubes (CNTs), multilayer graphene (MG), and silver microparticles. The results showed that all the additives possessed favorable thermal stability and corrosion resistance; in particular, CNTs and MG exhibited lower and more stable electrical contact resistance (ECR) and better lubricity abilities than Ag microparticles. Moreover, based on the characterization of the worn surfaces and the film thickness calculation, the favorable conductive and tribological properties of CNTs and MG were related to the high conductivity and specific structure of the additives and the good chemical inertness of MACs.

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“…Anti-stiction coatings are one of the key technologies to ensure the reliability of microelectromechanical systems (MEMS) devices, [1][2][3][4][5][6][7][8][9][10][11][12][13] especially when the sizes of mechanically moving parts are reduced to the nanometer scale (known as NEMS). 14,15) It is also essential to reduce stiction forces during the demolding procedure in nanoimprint technology to achieve the accurate formation of fine patterns.…”

Section: Introductionmentioning

confidence: 99%

Atmospheric vapor phase deposition of nanometer-thick anti-stiction fluoropolymer coatings for silicon surfaces

Itoh

Takahashi

Morita

et al. 2016

Jpn. J. Appl. Phys.

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Anti-stiction coatings for silicon surfaces are a key technology to prevent the failure of nanoelectromechanical systems (NEMS) during operation and improve the forming accuracy in nanoimprint technology. In this study, we propose an atmospheric vapor phase deposition method to coat a silicon surface with fluoropolymers such as the perfluoropolyethers Fomblin Zdol 2000 and Zdol 4000. Thickness distributions, surface energies, coverages, and stiction forces for the deposited films were evaluated experimentally. The proposed method resulted in over 90% coverage with a film thickness of about 1 nm. The film thickness uniformity was around 0.1 nm over an area of 5 × 5 mm2. This coating effectively reduced the stiction forces by half compared with a bare silicon surface.

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A Tribological Study of Multiply-Alkylated Cyclopentanes and Perfluoropolyether Lubricants for Application to Si-MEMS Devices

Cited by 12 publications

References 26 publications

Improving Tribological Properties of Multialkylated Cyclopentanes under Simulated Space Environment: Two Feasible Approaches

Improving Tribological Properties of Multialkylated Cyclopentanes under Simulated Space Environment: Two Feasible Approaches

Probing the Conductive and Tribological Behaviors of Solid Additives in Multiply Alkylated Cyclopentanes for Sliding Electrical Contact

Atmospheric vapor phase deposition of nanometer-thick anti-stiction fluoropolymer coatings for silicon surfaces

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