A tri-axial accelerometer with structure-based voltage operation by using series-connected piezoelectric elements

Kand, Kensuke; Iga, Yuka; Matsuoka, Junya; Jiang, Yonggang; Fujita, Takayuki; Higuchi, Kohei; Maenaka, Kazusuke

doi:10.1016/j.proeng.2010.09.253

Cited by 16 publications

(9 citation statements)

References 3 publications

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“…Notice the similarity between Equation (7) and Equation (10). In fact, Equation (7) is a special case of Equation (10) with a 1 = ∆ω 0 , β 1 = β, and a i = β i = 0 for i > 1.…”

Section: Frequency Deviations For Sensing Accelerationsmentioning

confidence: 90%

“…Notice the similarity between Equation (7) and Equation (10). In fact, Equation (7) is a special case of Equation (10) is a superposition of different frequencies, the Discrete Fourier Transform (DFT) of displacement x exhibits multiple sidebands, each of which corresponds to its own frequency.…”

Section: Frequency Deviations For Sensing Accelerationsmentioning

confidence: 99%

“…The research results are expected to be beneficial for chatter detection and intelligent manufacturing.Micromachines 2020, 11, 42 2 of 11 highly reliable, and low-cost sensors are in high demand in the era of the internet of things (IoT). The commonly used accelerometer transducer mechanisms include capacitive [8], piezoresistive [9], and piezoelectric [10,11] mechanisms, all of which produce an output voltage or charge proportional to the measured acceleration. While capacitive and piezoresistive transducers suffer from a relatively weak mechanical-electrical conversion efficiency and a higher power consumption, respectively, piezoelectric transducers surpass the other two mechanisms with a higher transducer efficiency and no standby power.…”

mentioning

confidence: 99%

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Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications

Chen

Xiao

et al. 2019

Micromachines

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With the rapid developments of the Industrial Era 4.0, numerous sensors have been employed to facilitate and monitor the quality of machining processes. Among them, accelerometers play an important role in chatter detection and suppression for reducing the tool down-time and increasing manufacturing efficiency. To date, most commonly seen accelerometers have relatively large sizes such that they can be installed only on the housing of spindles or the surfaces of workpieces that may not be able to directly capture actual vibration signals or obstruct the cutting process. To address this challenge, this research proposed a compact, wide-bandwidth resonant accelerometer that could be embedded inside high-speed spindles for real-time chatter monitoring and prediction.Composed of a double-ended tuning fork (DETF), a proof mass, and a support beam, the resonant accelerometer utilizes the resonance frequency shift of the DETF due to the bending motions of the structure during out-of-plane accelerations as the sensing mechanism. The entire structure based on commercially available quartz tuning forks (QTFs) with electrodes for symmetric-mode excitations. The advantages of this structure include low noise and wide operation bandwidth thanks to the frequency modulation scheme. A theoretical model and finite element analysis were conducted for designs and optimizations. Simulated results demonstrated that the proposed accelerometer has a size of 9.76 mm × 4.8 mm × 5.5 mm, a simulated sensitivity of 0.94 Hz/g, and a simulated working bandwidth of 3.5 kHz. The research results are expected to be beneficial for chatter detection and intelligent manufacturing.Micromachines 2020, 11, 42 2 of 11 highly reliable, and low-cost sensors are in high demand in the era of the internet of things (IoT). The commonly used accelerometer transducer mechanisms include capacitive [8], piezoresistive [9], and piezoelectric [10,11] mechanisms, all of which produce an output voltage or charge proportional to the measured acceleration. While capacitive and piezoresistive transducers suffer from a relatively weak mechanical-electrical conversion efficiency and a higher power consumption, respectively, piezoelectric transducers surpass the other two mechanisms with a higher transducer efficiency and no standby power. For a typical piezoelectric accelerometer, acceleration will cause the proof mass to exert a force on the beam or film, creating a charge due to piezoelectric effect. However, most resonant type accelerometers have relatively large sizes and are usually installed on the housing of spindles or the stage of workpiece holders.The goal of this research is to design a compact, resonant-type accelerometer for chatter detections. In general, the rotation speed of high-speed spindles can be as high as 30,000 rpm (i.e., 500 Hz), and chatter frequencies usually occur near the operation frequencies with several harmonics. For chatter detections, the working bandwidth of a measuring accelerometer should be 7 times the operation frequency, which is ...

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“…Notice the similarity between Equation (7) and Equation (10). In fact, Equation (7) is a special case of Equation (10) with a 1 = ∆ω 0 , β 1 = β, and a i = β i = 0 for i > 1.…”

Section: Frequency Deviations For Sensing Accelerationsmentioning

confidence: 90%

Section: Frequency Deviations For Sensing Accelerationsmentioning

confidence: 99%

mentioning

confidence: 99%

See 1 more Smart Citation

Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications

Chen

Xiao

et al. 2019

Micromachines

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show abstract

“…However, the single-beam design can only be used to sense a single-axis magnetic field. On the other hand, researchers have recently demonstrated piezoelectric-based, single-mechanical-mechanism three-axis accelerometers and energy harvesters [ 25 , 26 , 27 ]. That is, by using compact single-mechanical mechanisms (for example, a cross-linked beam), the accelerometers and the energy harvesters can achieve three-axis mechanical motion-sensing and three-axis vibrational energy-harvesting, respectively.…”

Section: Introductionmentioning

confidence: 99%

A Miniature Magnetic-Force-Based Three-Axis AC Magnetic Sensor with Piezoelectric/Vibrational Energy-Harvesting Functions

Hung

Yeh

Chung

2017

Sensors

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Abstract:In this paper, we demonstrate a miniature magnetic-force-based, three-axis, AC magnetic sensor with piezoelectric/vibrational energy-harvesting functions. For magnetic sensing, the sensor employs a magnetic-mechanical-piezoelectric configuration (which uses magnetic force and torque, a compact, single, mechanical mechanism, and the piezoelectric effect) to convert x-axis and y-axis in-plane and z-axis magnetic fields into piezoelectric voltage outputs. Under the x-axis magnetic field (sine-wave, 100 Hz, 0.2-3.2 gauss) and the z-axis magnetic field (sine-wave, 142 Hz, 0.2-3.2 gauss), the voltage output with the sensitivity of the sensor are 1.13-26.15 mV with 8.79 mV/gauss and 1.31-8.92 mV with 2.63 mV/gauss, respectively. In addition, through this configuration, the sensor can harness ambient vibrational energy, i.e., possessing piezoelectric/vibrational energy-harvesting functions. Under x-axis vibration (sine-wave, 100 Hz, 3.5 g) and z-axis vibration (sine-wave, 142 Hz, 3.8 g), the root-mean-square voltage output with power output of the sensor is 439 mV with 0.333 µW and 138 mV with 0.051 µW, respectively. These results show that the sensor, using this configuration, successfully achieves three-axis magnetic field sensing and three-axis vibration energy-harvesting. Due to these features, the three-axis AC magnetic sensor could be an important design reference in order to develop future three-axis AC magnetic sensors, which possess energy-harvesting functions, for practical industrial applications, such as intelligent vehicle/traffic monitoring, processes monitoring, security systems, and so on.

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“…Previously, we have reported fine-resolution processing techniques for piezoelectric Pb[Zr,Ti]O 3 (PZT) thin films [12] and proposed a procedure for signal operation for a MEMS mechanical structure using series-connected segmented PZT elements [13,14]. A schematic illustration of the device operation is shown in Figure 1(a).…”

Section: Introductionmentioning

confidence: 99%

Influence of Parasitic Capacitance on Output Voltage for Series-Connected Thin-Film Piezoelectric Devices

Kanda

Saito

Iga

et al. 2012

Sensors

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Series-connected thin film piezoelectric elements can generate large output voltages. The output voltage ideally is proportional to the number of connections. However, parasitic capacitances formed by the insulation layers and derived from peripheral circuitry degrade the output voltage. Conventional circuit models are not suitable for predicting the influence of the parasitic capacitance. Therefore we proposed the simplest model of piezoelectric elements to perform simulation program with integrated circuit emphasis (SPICE) circuit simulations). The effects of the parasitic capacitances on the thin-film Pb(Zr, Ti)O3, (PZT) elements connected in series on a SiO2 insulator are demonstrated. The results reveal the negative effect on the output voltage caused by the parasitic capacitances of the insulation layers. The design guidelines for the devices using series-connected piezoelectric elements are explained.

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A tri-axial accelerometer with structure-based voltage operation by using series-connected piezoelectric elements

Cited by 16 publications

References 3 publications

Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications

Design Optimization of a Compact Double-Ended-Tuning-Fork-Based Resonant Accelerometer for Smart Spindle Applications

A Miniature Magnetic-Force-Based Three-Axis AC Magnetic Sensor with Piezoelectric/Vibrational Energy-Harvesting Functions

Influence of Parasitic Capacitance on Output Voltage for Series-Connected Thin-Film Piezoelectric Devices

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