A thermal accelerometer directly integrated on organic substrate

Πετρόπουλος, Αναστάσιος; Moschos, Anastasios; Athineos, Spyros S.; Kaltsas, G.

doi:10.1016/j.proeng.2011.12.160

Cited by 11 publications

(11 citation statements)

References 3 publications

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“…Thermopiles acted as temperature detectors, a sensitivity of 13 mV/g and a bandwidth of 12 Hz were achieved [ 39 ]. After that, oil and water were used in their accelerometers in 2011, the accelerometer was fabricated directly on an SU-8 organic substrate based on PCB, which ensured a high level of thermal isolation, and the sensitivity was improved to 32 mV/g [ 9 ].…”

Section: Developments Of Micromachined Fluid Inertial Sensorsmentioning

confidence: 99%

“…Micromachined fluid inertial sensors are an important class of inertial sensors. They use a gas (e.g., He, air, SF 6 ) [ 6 ] or a liquid (e.g., oil, alcohol, water) [ 7 , 8 , 9 ] as the moving and sensitive elements instead of a solid mass. Considering the fact that gases are more commonly used than liquids, these sensors are usually called micromachined gas inertial sensors as well.…”

Section: Introductionmentioning

confidence: 99%

“…Since then, many studies have been conducted on these sensors. Most of the studies have focused on improving the sensor performance by optimizing the fluid medium with proper thermal properties (e.g., thermal conductivity, thermal diffusivity, kinematic viscosity), temperature sensing (e.g., thermal couple, thermistor), the material of the thermistor (e.g., metal thermistor, polysilicon thermistor, silicon PN junction thermistor) and the structure of the sensor (e.g., cavity shape and size, cap shape and size, distribution and size of the heater and thermistors) [ 6 , 7 , 8 , 9 , 10 , 11 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 , 32 , 33 , 34 , 35 , 36 , 37 , 38 , 39 , 40 ]. Combinations of Finite-Element-Modeling (FEM) simulation and experimental validation are the most commonly-used research methods.…”

Section: Introductionmentioning

confidence: 99%

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Micromachined Fluid Inertial Sensors

Liu

Zhu

2017

Sensors

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Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly includes thermal accelerometers and fluid gyroscopes, which have now been developed since the end of the last century for about 20 years. Compared with conventional silicon or quartz inertial sensors, the fluid inertial sensors use a fluid instead of a solid proof mass as the moving and sensitive element, and thus offer advantages of simple structures, low cost, high shock resistance, and large measurement ranges while the sensitivity and bandwidth are not competitive. Many studies and various designs have been reported in the past two decades. This review firstly introduces the working principles of fluid inertial sensors, followed by the relevant research developments. The micromachined thermal accelerometers based on thermal convection have developed maturely and become commercialized. However, the micromachined fluid gyroscopes, which are based on jet flow or thermal flow, are less mature. The key issues and technologies of the thermal accelerometers, mainly including bandwidth, temperature compensation, monolithic integration of tri-axis accelerometers and strategies for high production yields are also summarized and discussed. For the micromachined fluid gyroscopes, improving integration and sensitivity, reducing thermal errors and cross coupling errors are the issues of most concern.

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Section: Developments Of Micromachined Fluid Inertial Sensorsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Micromachined Fluid Inertial Sensors

Liu

Zhu

2017

Sensors

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“…Moreover, the chamber was filled with an inert gas (xenon) instead of CO 2 or air to avoid the component oxidizing effect. (15,16) Thus, both the reliability and life cycle of the accelerometer could be improved. On the other hand, the hemicylindrical chamber caused the sensitivity to be higher than that with the traditional rectangular chamber.…”

Section: Introductionmentioning

confidence: 99%

Novel Thermal Convection Inclinometer

2018

Sensors and Materials

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In this research, we applied several new ideas for a novel thermal convection inclinometer design. (1) A flexible polyimide (PI) substrate was used instead of a silicon wafer so that the new design can reduce the energy loss of the heater to the substrate. (2) Both the heater and thermal sensors were formed directly on the PI substrate without floating over a grooved cavity on a silicon wafer so that the device is more reliable and cheaper. (3) Inert xenon gas was filled into a hemicylindrical chamber instead of the traditional CO 2 gas in a rectangular one, so that we could not only increase the device sensitivity but reduce the oxidation effect. (4) A stacked layer of aluminum nitride was inserted under each thermal sensor to increase the device sensitivity. A prototype device was made to prove the performance of the new design.

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“…(1)(2)(3)(4)(5)(6)(7)(8)(9)(10)(11)(12)(13)(14)(15)(16)(17) Some are made using thermal convection technologies, and their chambers may be filled with air, CO 2 , or liquids. It was reported that the sensitivity of an inclinometer can be increased by using a nonfloating-type structure on a flexible substrate without fabricating the conventional cavities of floating-type silicon-based devices.…”

Section: Introductionmentioning

confidence: 99%

Wireless Inertial Sensors Made on Flexible Substrates and Based on Thermal Convection and Near-Field-Communication Principles

2016

Sensors and Materials

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In this study, several kinds of wireless inertial sensors, such as accelerometers, angular accelerometers and inclinometers based on the thermal convection principle, were integrated with near-field-communication (NFC) antennas and made on a flexible substrate so that the devices can become wireless sensors. The reason to apply a flexible substrate instead of the traditional silicon was to reduce the power leaked through the flexible substrate, because the thermal conductivity of silicon is 0.06-0.0017 W/(cm·K), which is 25 times larger than that of the flexible substrate, 1.48 W/(cm·K). Another key goal was to fabricate the nonfloating-type devices without making a cavity on the substrate, so that the new devices would be easier to fabricate and more reliable than the previous floating-type; in which the components of heaters and thermal sensors lay over the cavity on the silicon substrate. Also inert Xe gas was used to fill the chamber instead of the previously used CO 2 or air, so that the oxidization problem of the thermal sensors caused by the heater can be eliminated. On the other hand, one can fabricate the components of heaters and thermal sensors on the flexible substrate directly or stack them on a layer of aluminum nitride and then use some packages with hemispherical or hemicylindrical chambers instead of rectangular ones. The sensitivities were analyzed and compared with those of the previous sensors to prove the feasibility of these novel ideas.

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A thermal accelerometer directly integrated on organic substrate

Cited by 11 publications

References 3 publications

Micromachined Fluid Inertial Sensors

Micromachined Fluid Inertial Sensors

Novel Thermal Convection Inclinometer

Wireless Inertial Sensors Made on Flexible Substrates and Based on Thermal Convection and Near-Field-Communication Principles

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