A System for Positioning an Optical Tunnel Measuring Transducer of a Microoptoelectromechanical Micro-g Accelerometer

Barbin, Evgenij S.; Nesterenko, Tamara G.; Koleda, Aleksej N.; Shesterikov, E. V.; Kulinich, Ivan V.; Kokolov, A. A.

doi:10.1109/edm55285.2022.9855026

Cited by 5 publications

(1 citation statement)

References 8 publications

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“…The threshold sensitivity of the accelerometer-the minimal signal that can be measured-can be quantitatively estimated as the noise-equivalent acceleration (NEA) in units of g/ √ Hz (g = 9.81 m/s 2 ) [40,41].…”

Section: Coupling Lengthmentioning

confidence: 99%

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

et al. 2023

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Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages—such as high sensitivity and immunity to electromagnetic noise—over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelerometers, which include a spring mass and a tunneling-effect-based optical sensing system containing an optical directional coupler consisting of a fixed and a movable waveguide separated by an air gap. The movable waveguide can perform linear and angular movement. In addition, the waveguides can lie in single or different planes. Under acceleration, the schemes feature the following changes to the optical system: gap, coupling length, overlapping area between the movable and fixed waveguides. The schemes with altering coupling lengths feature the lowest sensitivity, yet possess a virtually unlimited dynamic range, which makes them comparable to capacitive transducers. The sensitivity of the scheme depends on the coupling length and amounts to 11.25 × 103 m−1 for a coupling length of 44 μm and 30 × 103 m−1 for a coupling length of 15 μm. The schemes with changing overlapping areas possess moderate sensitivity (1.25 × 106 m−1). The highest sensitivity (above 6.25 × 106 m−1) belongs to the schemes with an altering gap between the waveguides.

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Section: Coupling Lengthmentioning

confidence: 99%

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

et al. 2023

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The first distributed-mass high-performance programmable optoelectromechanical steerable motion-wave sensors focused on sophisticated biomedical applications

Hussein

2023

SN Appl. Sci.

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This paper introduces the first high-performance distributed-mass acoustic sensor made of cascaded differential phase shift suspended slot waveguide sections in a Mach–Zehnder interferometer optical transducer circuit. The heavyweight seismic mass used in traditional optoelectromechanical sensors is replaced by an fg lightweight coupling arm yielding an extra compact fast responding structure enabling utilizing over $$64$$ 64 cascaded sections and resulting in enhancing the performance by hundreds of times. The transducer operation relies on converting the acoustic vibration into phase modulation of the light for a splendid performance. The novel sensor architecture challenges achieving optical sensitivities higher than $$33\times {10}^{3} \%/\mathrm{g}$$ 33 × 10 3 % / g (33 times supersensitive), operating at ultrasonic acoustic speeds higher than 27 MHz, and recognizing resolutions in the 1 ng order. The programmable sensor is voltage-controlled supporting the operation in multimodes. Four operation modes are elucidated including the natural aspiration force, turbo electrostatic force open-loop voltage control, zero-force closed-loop voltage control, and dynamic turbo-force closed-loop voltage control. Wide dynamic ranges for controlling the optical sensitivity and maximum measurable acceleration up to 115.5 dB are reported. Steering capabilities of the acoustic beam in the azimuth plane are demonstrated utilizing two-spoke and three-spoke directional architectures supporting $$116.64^\circ$$ 116 . 64 ∘ and $$360^\circ$$ 360 ∘ of respective steering angles. Potential acoustic biosignal-based applications in the medical field are outlined.

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Optimizing the Structural Parameters of the Mechanical Sensing Element of a Microoptoelectromechanical Micro-g Accelerometer

Barbin,

Nesterenko,

Koleda

et al. 2023

2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM)

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A System for Positioning an Optical Tunnel Measuring Transducer of a Microoptoelectromechanical Micro-g Accelerometer

Cited by 5 publications

References 8 publications

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

The first distributed-mass high-performance programmable optoelectromechanical steerable motion-wave sensors focused on sophisticated biomedical applications

Optimizing the Structural Parameters of the Mechanical Sensing Element of a Microoptoelectromechanical Micro-g Accelerometer

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