Optimizing the Structural Parameters of the Mechanical Sensing Element of a Microoptoelectromechanical Micro-g Accelerometer

Barbin, Evgenij S.; Nesterenko, Tamara G.; Koleda, Aleksei N.; Shesterikov, Evgeniy V.; Kulinich, Ivan V.; Kokolov, Andrey A.

doi:10.1109/edm58354.2023.10225059

2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM) 2023

DOI: 10.1109/edm58354.2023.10225059

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Optimizing the Structural Parameters of the Mechanical Sensing Element of a Microoptoelectromechanical Micro-g Accelerometer

Evgenij S. Barbin,

Tamara G. Nesterenko,

Aleksei N. Koleda

et al.

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Optimizing the Structural Parameters of the Mechanical Sensing Element of a Microoptoelectromechanical Micro-g Accelerometer

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References 20 publications

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