A surface motor-driven planar motion stage integrated with an XYθ surface encoder for precision positioning

Gao, Wei; Dejima, Shuichi; Yanai, Hiroaki; Katakura, Kei; Kiyono, Satoshi; Tomita, Yoshiyuki

doi:10.1016/j.precisioneng.2003.12.003

Cited by 125 publications

(60 citation statements)

References 29 publications

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“…The r is the theoretical scroll radius of every measurement point. The Y-directional offset of probe centre is compensated by the equation (5).…”

Section: A Measurement Results After Error Separationmentioning

confidence: 99%

“…Taking into consideration the influence of cutting oil and chips, a contact-type displacement probe made of ruby in the form of a ball was employed in the developed measurement system. The probe fixed on the end of X axis was used for scanning the flank involute profile mounted on the rotary stage [5]. A ruby ball with a diameter of 5 mm was attached to the end of the probe axis.…”

Section: Introductionmentioning

confidence: 99%

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Rapid Measurement of Involute Profiles for Scroll Compressors

Yang

Arai²,

Gao³

2009

Measurement Science Review

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Scroll compressors are widely used in air conditioners, vacuum pumps and so on. Rapid measurement of flank profile of a scroll compressor is important to improve the compression efficiency and decrease noises. A contact probe made of ruby was used for measurement of flank profile. The probe was moved by a linear slide along the X axis at a constant speed. The scroll workpiece was fixed on a precision rotary stage. The relationship between the stage rotational speed and the X axis moving speed complies with the Archimedean curve. The measurement data of the rapid measurement system were analyzed and measurement errors were removed by compensation of the offset between the coordinates of the rotary stage center and those of workpiece center. The measurement results were compared with those measured by a commercial coordinate measuring machine (CMM). The measurement time for the involute profile of the scroll is shortened to 153 seconds by the developed rapid measurement system from the 10 minutes measurement time by the CMM while the measurement accuracy is kept the same.

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“…The r is the theoretical scroll radius of every measurement point. The Y-directional offset of probe centre is compensated by the equation (5).…”

Section: A Measurement Results After Error Separationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Rapid Measurement of Involute Profiles for Scroll Compressors

Yang

Arai²,

Gao³

2009

Measurement Science Review

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“…과 이동 개체를 고정단에서 동작 영역 전 구간에 걸쳐 직접 측정하는 방법 (3,4) 이 있지만 이를 위 한 대표적인 측정 수단인 레이저 간섭계의 경우광원에 대한 안 정화와 온도 드리프트 문제로 항온, 항습 등 환경에 대한 제약 이 상당히 크다 (5,6) . 본 논문은 그리드 패턴 등의 참조 격자를 이용하여 2차원 변 , 자기저항 .…”

Section: 서 론unclassified

Surface Encoding Method Based on the Superposed Pattern

Jung¹,

Park²

2012

Journal of manufacturing engineering & technology

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Instead of the surface pattern arranged repeatedly in two axial direction on a plane, we propose double patterns superposing two one-axial linear patterns as a reference target for surface encoding. A upper layer of the superposed pattern is the transparent glass with grooves cut in it at a fixed pitch. The position is sensed by detecting a shift of beam due to difference of a refractive index. And a lower layer is the aluminum with color-coated grooves. The amount of beam reflected on the layer varies according to its targeting position and is detected for encoding. For the above reference pattern, we can detect two-axial positions using only the single beam. Furthermore, the pattern size can be expanded with a size of the detector kept constant, meaning that the measured range can be expanded easily. In this paper, we review the existing optical encoding methods for grid pattern, and discuss the hardware implementation of the suggested surface encoding method. . 본 논문은 그리드 패턴 등의 참조 격자를 이용하여 2차원 변

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“…The sinusoidal ring surface is a typical shape of freeform surfaces, which can be used in positioning multi-axis precision motion stages and as aerospace components. The surfaces are required to be of large size, and have sub-micrometre form accuracy and a nanometre surface finish in those applications [4] and [5].…”

Section: Introductionmentioning

confidence: 99%

Ultra-Precision Machining of a Large Amplitude Sinusoidal Ring Surface Based on a Slow Tool Servo

Zhao

et al. 2016

SV-JME

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A surface motor-driven planar motion stage integrated with an XYθ surface encoder for precision positioning

Cited by 125 publications

References 29 publications

Rapid Measurement of Involute Profiles for Scroll Compressors

Rapid Measurement of Involute Profiles for Scroll Compressors

Surface Encoding Method Based on the Superposed Pattern

Ultra-Precision Machining of a Large Amplitude Sinusoidal Ring Surface Based on a Slow Tool Servo

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