We present the temperature-dependent thermolysis of siloxy-substituted ZnO single-source precursors into zinc and zinc oxide, respectively. The solid-state pyrolysis at low temperatures leads to the formation of ZnO powder with a very high surface area whereas the thermolysis in solution yields ZnO colloids. The materials are characterized by UV/VIS, photoluminescence, X-Ray Diffraction (XRD), and Transmission Electron Microscopy (TEM).