A Study on the Cross-Sectional Shape of Kerf Cut with Micro Abrasive Air Jet

Abstract

Micro abrasive air jet (MAAJ) cutting is a promising technology for the fabrication of three-dimensional microstructures in hard and brittle materials. In this paper, a study on the cross-sectional shape of the kerf cut with MAAJ is presented. It shows that the machining depth and slope of the sidewall increase with an increase in air pressure, abrasive flow rate and jet incidence angle, while decrease with an increase in nozzle traverse speed. Using a dimensional analysis technique, predictive model for cross-sectional profile is developed. The research results may be meaningful to the highly precision three-dimensional micro-structural cutting.

Micro-Channel Fabrication on Quartz Crystals by a Micro Abrasive Air Jet

“…While the kerf width increases marginally and steadily, the depth increases in a greater rate with air pressure. Based on the jet velocity field analysis, an increase in air pressure results in an increase in abrasive speed, abrasive kinetic energy, machinability and machining depth [5][6][7]. By contrast, the kerf width is related to the effective jet cross-section area.…”

Kerf Profile Characteristics in Abrasive Air Jet Micromachining

“…It is noticed that with an increase in air pressure, the hole diameter and groove width increases marginally, while the depth of cut increases sharply. Based on the jet velocity field analysis, it is acknowledged that an increase in air pressure results in an increase in abrasive speed and abrasive kinetic energy, so that the depth of cut is increased [7]. By contrast, the kerf width (hole diameter and groove width) is related to the jet effective cross-section area.…”

“…Considerable research and development efforts have been made to study this micromachining process with a view to improve its cutting performance [2][3][4][5]. An understanding of the characteristics of profiles produced in AJM is important in order to control the shape of patterned microstructures [6][7][8]. However, the technology for micromachining using micro abrasive jet with air as the flow medium is still under development and its many aspects are yet to be fully understood.…”