Micro-Channel Fabrication on Quartz Crystals by a Micro Abrasive Air Jet

Abstract

Abrasive air jet micro-machining is a new promising technology for processing brittle material. An experimental study of micro-channeling on quartz crystals using an abrasive air jet is presented. The effect of the processing parameters on the produced channel profile such as the channel width, depth and kerf taper angle is analyzed, along with the effect on the roughness of channel bottom surfaces. Plausible trends of the major process performance measures with respect to the process parameters have been revealed. These trends are useful in guiding the selection of process parameters in practice.

Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging

“…Abrasive jet machining is a non-conventional process whereby the surface is treated using an abrasive jet to create a specific surface shape [ 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 ]. The AJM process typically uses abrasives such as , garnet, SiC, or diamond particles and has the capability to handle a diverse range of substrates such as metals, glass, ceramics, polymers, and composites [ 19 , 22 ].…”

“…The non-thermal machining method does not affect material properties and can be used in non-dust-free environments. It is widely used in semiconductor manufacturing, electronic devices, microfluidic channels, and microelectromechanical systems (MEMS) [ 16 ].…”

Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging

“…Abrasive jet machining is a non-conventional process whereby the surface is treated using an abrasive jet to create a specific surface shape [14][15][16][17][18][19][20][21][22][23][24][25][26]. The AJM process typically uses abrasives such as Al 2 O 3 , garnet, SiC, or diamond particles and has the capability to handle a diverse range of substrates such as metals, glass, ceramics, polymers, and composites [19,22].…”