A study on MicroCantilever Deflection for the Infrared Image Sensor using Bimetal Structure

Abstract

This is a widespread requirement for low cost lightweight thermal imaging sensors for both military and civilian applications. The feasibility of micromechanical optical and infrared (IR) detection using microcantilevers is demonstrated. Microcantilevers provide a simple Structurefor developing single- and multi-element sensors for visible and infrared radiation that are smaller, more sensitive and lower in cost than quantum or thermal detectors. Microcantilevers coated with a heat absorbing layer undergo bending due to the differential stress originating from the bimetallic effect. This paper reports a micromachined silicon uncooled thermal imager intended for applications in automated process control.

Microthermomechanical infrared sensors

“…In the years between 2007 and 2011 the research group from the Korea Advanced Institute of Science and Technol− ogy, Daejeon has reported some minor activities in the theo− retical analysis of capacitive readout IR micromirrors [43][44][45]. No thermal imagery has been presented.…”