A study on mechanism of nano-cutting single crystal silicon

Fang, Fengzhou; Wu, H.; Zhou, Wei; Hu, Xiaoli

doi:10.1016/j.jmatprotec.2006.12.007

Cited by 149 publications

(63 citation statements)

References 16 publications

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“…However, this study did not involve the investigation of chip formation. Later on, an MD simulation of nano-cutting on single crystal silicon was carried out [26]. Similar to the conclusions made by Zhang and Tanaka [27] on the nano-cutting of copper and Zhang and Tanaka [28] on the nano-cutting on silicon, it was found that when the ratio was less than a critical value, the chip formed through extrusion.…”

Section: Tool Cutting Edge Radiussupporting

confidence: 59%

Nano-machining of materials: understanding the process through molecular dynamics simulation

Cui

Zhang

2016

Adv. Manuf.

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Molecular dynamics (MD) simulation has been widely applied in various complex, dynamic processes at atomistic scale, because an MD simulation can provide some deformation details of materials in nano-processing and thus help to investigate the critical and important issues which cannot be fully revealed by experiments. Extensive research with the aid of MD simulation has provided insights for the development of nanotechnology. This paper reviews the fundamentals of nano-machining from the aspect of material structural effects, such as single crystalline, polycrystalline and amorphous materials. The classic MD simulations of nano-indentation and nano-cutting which have aimed to investigate the machining mechanism are discussed with respect to the effects of tool geometry, material properties and machining parameters. On nano-milling, the discussion focuses on the understanding of the grooving quality in relation to milling conditions.

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Section: Tool Cutting Edge Radiussupporting

confidence: 59%

Nano-machining of materials: understanding the process through molecular dynamics simulation

Cui

Zhang

2016

Adv. Manuf.

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“…In nanocutting process, Fang et al [5,94,113] investigated the influence of the tool edge radius on nano-cutting mechanism by both molecular dynamics analysis and experimental study. The results showed that the atoms are extruded in front of the cutting tool, when the UCT is 1 nm and edge radius is 5 nm.…”

Section: Influence On Chip Formation and Minimum Uctmentioning

confidence: 99%

“…A new nano-metric cutting model that material removal at the nanoscale is on extrusion Fig. 12 Effect of tool edge micro-geometry on tool isotherms a sharp tool, b round tool [80] mechanism was proposed by Fang et al [5,88,94,113], as shown in Fig. 14.…”

Section: Influence On Chip Formation and Minimum Uctmentioning

confidence: 99%

Recent Advances in Micro/Nano-cutting: Effect of Tool Edge and Material Properties

Fang

2018

Nanomanuf Metrol

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Micro-and nano-machining technology has been applied in industry to generate high-precision parts with micro/nanometric accuracy or feature size in the recent decades. Cutting is one of the most powerful manufacturing processes, and the material removal mechanism is urgently demanded by the industry to understand and improve the micro/nano-machining process efficiently at a low cost. This paper presents the recent advances in cutting mechanism and its applicability for predicting the surface generation and chip formation, especially when material is removed in micro-and nanoscale. In addition to the industry-concerned performance parameters, fundamental physical parameters such as stresses, strains, temperatures, phase transformation, minimum uncut chip thickness and size effects are discussed in this paper for the indepth understanding of the micro/nano-cutting process.

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“…Thus, compression introduced by the tool edge is critical for the ductile mode machining of brittle materials. Plastic flow would occur in the phase transition region and the phase transition region would be extruded to form the chip as the tool advances [51,57,58]. Shear stress arises owing to the plastic flow, but it is not the driving force of chip formation as in the shear model states in conventional cutting [165,185].…”

Section: Mechanisms Of Nanomanufacturingmentioning

confidence: 99%

“…Nanocutting has significant potential for further advancements [51,[56][57][58]. As it is still in the early stages, researchers must put more efforts into systematically developing nanocutting theory.…”

Section: Conclusion and Perspectivementioning

confidence: 99%