Abstract:The performance of stacked and miniature three-dimensional spiral inductors is analyzed and compared to standard planar coils. For this purpose, nine of these new structures have been fabricated in a 0.35-µm four-metal SiGe process. According to the measurement results, some of the proposed stacked inductors occupy only 48% of the area of a conventional planar inductor with the same inductance value and work frequency. The area reduction is even more significant with the miniatur e 3-D structures, which occupy… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.