Cerium dioxide (CeO 2 ) thin �lms with varying Ce concentrations (0.1 to 0.9 M, metal basis) were deposited on soda-lime-silica glass substrates using spin coating. It was found that all �lms exhibited the cubic �uorite structure a�er annealing at 500 ∘ C for 5 h. e laser Raman microspectroscopy and GAXRD analyses revealed that increasing concentrations of Ce resulted in an increase in the degree of crystallinity. FI� and FESEM images con�rmed the laser Raman and GAXRD analyses results owing to the predicted increase in �lm thickness with increasing Ce concentration. However, porosity and shrinkage (drying) cracking of the �lms also increased signi�cantly with increasing Ce concentrations. UV-VIS spectrophotometry data showed that the transmission of the �lms decreased with increasing Ce concentrations due to the increasing crack formation. Furthermore, a red shi� was observed with increasing Ce concentrations, which resulted in a decrease in the optical indirect band gap.