A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots

Venkatesh, S.; Davenport, R. L.; Foxhoven, P.; Nulman, J.

doi:10.1109/66.641483

Cited by 221 publications

(121 citation statements)

References 5 publications

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“…It is generally assumed that the repositioning requires much less time (θ ) than does the robot's movement between two adjacent machines (δ) or any machine's processing ( p i ). A study that assumes that θ = δ can be found in Venkatesh et al (1997). When using 1-unit cycles with θ = 0, the throughput of a dual gripper robot cell is equivalent to that of a single gripper robot cell whose machines each have a unitary buffer Finke, Gueguen, and Brauner, 1996).…”

Section: Dual Gripper Robotsmentioning

confidence: 99%

“…Many diverse industries use robotic cells (see Section 11). A large number of studies address the semiconductor manufacturing industry: Akçali, Nemoto, and Uzsoy (2001), Kumar, Ramanan, and Sriskandarajah (2005), Perkinson et al (1994), Perkinson, Gyurcsik, and McLarty (1996), Venkatesh et al (1997), and Wood (1996). Other implementations for which studies have been published include machining of castings for truck differential assemblies (Asfahl, 1985), a single hoist electroplating line for printed circuit boards (Lei and Wang, 1994), testing and inspecting boards used in mainframe computers (Miller, 1984), crane scheduling for computer integrated manufacturing, textile mills, and engine block manufacturing (Su and Chen, 1996).…”

Section: Introductionmentioning

confidence: 99%

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Sequencing and Scheduling in Robotic Cells: Recent Developments

Dawande

Geismar

Sethi

et al. 2005

J Sched

190

116

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A great deal of work has been done to analyze the problem of robot move sequencing and part scheduling in robotic flowshop cells. We examine the recent developments in this literature. A robotic flowshop cell consists of a number of processing stages served by one or more robots. Each stage has one or more machines that perform that stage's processing. Types of robotic cells are differentiated from one another by certain characteristics, including robot type, robot travel-time, number of robots, types of parts processed, and use of parallel machines within stages. We focus on cyclic production of parts. A cycle is specified by a repeatable sequence of robot moves designed to transfer a set of parts between the machines for their processing.We start by providing a classification scheme for robotic cell scheduling problems that is based on three characteristics: machine environment, processing restrictions, and objective function, and discuss the influence of these characteristics on the methods of analysis employed. In addition to reporting recent results on classical robotic cell scheduling problems, we include results on robotic cells with advanced features such as dual gripper robots, parallel machines, and multiple robots. Next, we examine implementation issues that have been addressed in the practice-oriented literature and detail the optimal policies to use under various combinations of conditions. We conclude by describing some important open problems in the field.

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Section: Dual Gripper Robotsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Sequencing and Scheduling in Robotic Cells: Recent Developments

Dawande

Geismar

Sethi

et al. 2005

J Sched

190

116

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“…A one-wafer action sequence is defined as a sequence of robot actions which pick and place each module exactly once [2]. In [3], [4], analytical models of steady-state throughput are discussed for a cluster tool equipped with single-blade and double-blade robots. A single-blade robot can usually hold only one wafer at a time while a double-blade robot has two independent arms and, therefore, can hold two wafers at a time.…”

Section: Process Modulementioning

confidence: 99%

“…For a single-blade robot, Perkinson et al [3] propose a "pull" (or so-called downhill) optimal schedule strategy for the robot moving sequence. For a double-blade robot, Venkatesh et al [4] propose one optimal schedule by a "swap" action. Dawande et al [2] summarize the sequencing and scheduling in robotic cells, which is similar to cluster tools.…”

Section: Process Modulementioning

confidence: 99%

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Scheduling Analysis of Cluster Tools with Buffer/Process Modules

Ding

Song

et al. 2007

Proceedings 2007 IEEE International Conference on Robotics and Automation

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Abstract-Modeling and scheduling of cluster tools are critical to improving the productivity and to enhancing the design of wafer processing flows and equipment for semiconductor manufacturing. In this paper, we extend the decomposition methods in [1] for multi-cluster tools with buffer/process modules (BPMs). The computation of the lower-bound cycle time (fundamental period) is presented. Optimality conditions and robot schedules that realize such lower-bound values are then provided using "pull" and "swap" strategies for single-blade and double-blade robots, respectively. The impact of BPMs on throughput and robot schedules is studied. It is found that such an impact depends on the BPM processing time and the cycle times of the decomposed clusters on both sides of BPMs. A chemical vapor deposition (CVD) tool is used as an example of multi-cluster tools to illustrate the proposed method, analysis, and algorithms. The numerical and experimental results demonstrate the effectiveness and efficiency of the algorithms.

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Modeling, Analysis, Scheduling, and Control of Cluster Tools in Semiconductor Fabrication

Zhou

Mammar

2015

Contemporary Issues in Systems Science and Engineering

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A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots

Cited by 221 publications

References 5 publications

Sequencing and Scheduling in Robotic Cells: Recent Developments

Sequencing and Scheduling in Robotic Cells: Recent Developments

Scheduling Analysis of Cluster Tools with Buffer/Process Modules

Modeling, Analysis, Scheduling, and Control of Cluster Tools in Semiconductor Fabrication

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