A Spice-based multi-physics simulation technique for integrated MEMS

Toshiyoshi, Hiroshi

doi:10.1109/sispad.2011.6035069

Cited by 7 publications

(4 citation statements)

References 4 publications

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“…To model this behavior, two cross-coupled behavioral blocks are applied, as can be observed in Fig. 2: One to model the mechanical impact [3]- [4], and the other to represent the inductance behavior. …”

Section: Actuator Modelmentioning

confidence: 99%

Study of magnetic actuation systems

Ezra

Peretz

2014

2014 IEEE 28th Convention of Electrical &Amp; Electronics Engineers in Israel (IEEEI)

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This study presents an analysis of magnetic actuation systems (MAS). The behavior of an actuator is described by crosscoupled models of the mechanical and the electromagnetic interaction. The full MAS model is analyzed as a combination of four systems: electrical (power stage), control, mechanical and magnetic systems. In addition, the behavioral model that was developed, emulates the static and dynamic behavior of the actuator. The main benefit of the modeling approach is that it significantly reduces the complexity and burden in the design and control of multidisciplinary systems. An extended, non-linear inductor model has been developed, demonstrating the challenging control task of displacement regulation. The MAS model and the individual models have been demonstrated by simulations.) Index Terms-Magnetic actuation systems, modeling and simulation, non-linear inductor model, closed loop analysis, controller design.

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Section: Actuator Modelmentioning

confidence: 99%

Study of magnetic actuation systems

Ezra

Peretz

2014

2014 IEEE 28th Convention of Electrical &Amp; Electronics Engineers in Israel (IEEEI)

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“…It can be used to simulate the mechanical behaviour of the MEMS cantilever beam under any electrical excitation in a circuit simulator. Equivalent circuit models for transducers [5]- [7], [9], [10], [13], [14], Capacitive Micromachined Ultrasonic Transducers [15] have been developed, however efforts to electrically model MEMS cantilever are not reported much. The electrical model is able to uniquely evaluate the performance of the MEMS cantilever beam through its pull-in induced behaviour by predicting Pull-in voltage without the need for fitting.…”

Section: Introductionmentioning

confidence: 99%

Development of Nonlinear Electromechanical Coupled Macro Model for Electrostatic MEMS Cantilever Beam

Singh

Patrikar

2019

IEEE Access

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The deployment of MicroElectroMechanical System (MEMS) cantilever in the electronic systems is continuously increasing. These devices are usually interfaced with electronic circuits. It is important to build its macro model for rapid system design and simulation. This paper proposes development of an electromechanical coupling macro model of electrostatically actuated MEMS cantilever for straight and curled beam configurations. It consists of linear electrical components and nonlinear dependent sources, which represent mechanical parameters and electromechanical coupling in the system. In order to model device mechanics, analytical formulations are done and calculations are adapted to macro model. A methodology to derive electromechanical coupling as a function of bias voltage is developed. This electrical model is capable of predicting the device characteristic behaviour before the onset of pull-in instability region and estimates pull-in voltage. Such macro model can be easily implemented in any circuit simulation platform and be used to demonstrate the possible advantage of using this scheme for device and system dynamics optimization. To arrive at equivalence, an analytical formulation for spring constant and pull-in voltage of cantilever based on the partial load distribution and curling is derived. It utilizes the methodology based on nonlinear electrostatic pressure approximated by its linearized uniform counterpart and mechanical force-deflection model. An electrical characterization of fabricated MEMS cantilever is done to obtain the experimental value of pull-in voltage. Simulation Program with Integrated Circuit Emphasis (SPICE) simulations results for the developed model is obtained for actual device dimensions and is in good agreement with analytical and experimental results.INDEX TERMS Electrostatic devices, macro model, microelectromechanical systems.

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“…Simulation studies have been extended to electrostatic digital torsion mirror device integrated with CMOS level shifter circuit. Toshiyoshi [20] presents an LSI designer friendly and handy simulation technique for integrated MEMS using LTspice simulator. This approach uses a lumped parametric model to describe an electromechanical component and interpret it as an electrical equivalent circuit.…”

Section: Introductionmentioning

confidence: 99%

“…From the literature, it is evident that few authors [12,14,15,20] have developed circuit models for MEMS actuators. However, circuit models incorporating squeeze film effects are sparse.…”

Section: Introductionmentioning

confidence: 99%

An analysis of electrostatically actuated micro vibrating structures incorporating squeezed film damping effect using an electrical equivalent circuit

Kavitha

Madhan

2016

J Braz. Soc. Mech. Sci. Eng.

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This paper investigates the response of microcantilever and microbridge actuators, under alternating current (AC) and direct current (DC) excitations. The analysis is carried out by simulating the electrical equivalent circuit of the actuators. An analogous circuit model for evaluation of velocity and acceleration in the microstructure is incorporated to the basic circuit model. The influence of squeeze film on the vibrating structure is also investigated. The effect of DC bias voltage on displacement, capacitance and electrostatic force are investigated. The transient response predicts a minimal change due to the pressure variation in the damping medium owing to the geometrical dimensions of the elements in the actuator. The frequency dependence of velocity and acceleration are also evaluated in this study.

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A Spice-based multi-physics simulation technique for integrated MEMS

Cited by 7 publications

References 4 publications

Study of magnetic actuation systems

Study of magnetic actuation systems

Development of Nonlinear Electromechanical Coupled Macro Model for Electrostatic MEMS Cantilever Beam

An analysis of electrostatically actuated micro vibrating structures incorporating squeezed film damping effect using an electrical equivalent circuit

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