A small-size, fast-settling, low-cost thermal regulator for chip surface measurements

Abstract

A hstract -This pqwr pwsents o tlzmnal wgularor devdojwd 10 allow rlrr ~l r c t r i r a l char.acrrri:arim of inlqmted <;i,ircuir,x n w r a wide tmipo-aruw range. Thc propsed roliirion is based on o Pd1it.r cell, which is placed close rn tire borrosr su$um of rlrr dwice under ~C S I (IlllT) and provides rhe required rooling/7waring power. Tlic brrsic .&rurer of rhc proposed rhmmd rr.gulrzror arc low cnsr, smull sire, m s j , and accurarc rmri~crafun~ udjusrnzc~~~, and fasr s d i n g rime. No need erisrs Jbr a rhemwl rliaiihcr. wlrich ullow~s rhe D U l io bc diarurrcrixd by iwuiis of chip su$kc ~izrasurt.rneiiis by USitiR a inicropruhr srarinn. Muin measured pcrjiinrzanccs indud<, low power consuinprion (abour 30 W in rhr WUI-SI cas?). U S~l l / b l g r i i I v nJ 4 rrlin, arid lenip~ral1ire rarige adquarc Jiw mosr applicurions ( 4 0 "C rn +I20 "C. whidi can bc firlhcr rrrerided b? using hyo Peltier cells coiirirrred bi series).Keywords -1'elrier w11, electric cooling, rhenml regulator, probe srarion. Tlien,roPlrc.i~i~r, Mar. 26~29. 1996. pp. 234.231. 151 J.P. Holman. Iluar ~runr/pr". Tokyo. Japan: Mc G n w Hill c ,~t ! r~~~, ,~p ,113 P<,w?~ E I I~~, , c c~~~, s .