2017
DOI: 10.1021/acsnano.7b02866
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A Sliding-Mode Triboelectric Nanogenerator with Chemical Group Grated Structure by Shadow Mask Reactive Ion Etching

Abstract: The sliding-mode triboelectric nanogenerator (S-TENG) with grated structure has important applications in energy harvest and active sensors; however its concavo-convex structure leads to large frictional resistance and abrasion. Here, we developed a S-TENG with a chemical group grated structure (S-TENG-CGG), in which the triboelectric layer's triboelectric potential has a positive-negative alternating charged structure. The triboelectric layer of the S-TENG-CGG was fabricated through a reactive ion etching pro… Show more

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Cited by 91 publications
(45 citation statements)
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“…Furthermore, the chemical functionalization of surface contact materials can be used as a practical solution to the friction and wear due to the structural problem of slidingmode TEGs. As shown in Figure 5(d), the positively charged nylon film partially changed to negatively charged surface through the reactive ion etching (RIE) with a metal mask [103]. The surface-modified slidingmode TEGs exhibited high stability and strong durability owing to the chemical functionalization.…”
Section: Chemical Functionalization and Modificationmentioning
confidence: 99%
“…Furthermore, the chemical functionalization of surface contact materials can be used as a practical solution to the friction and wear due to the structural problem of slidingmode TEGs. As shown in Figure 5(d), the positively charged nylon film partially changed to negatively charged surface through the reactive ion etching (RIE) with a metal mask [103]. The surface-modified slidingmode TEGs exhibited high stability and strong durability owing to the chemical functionalization.…”
Section: Chemical Functionalization and Modificationmentioning
confidence: 99%
“…In the present case, TENG is operating in a sliding mode in the conductor‐to‐dielectric configuration (Al electrodes are conductors whereas the FEP film is a dielectric material). According to Shang et al the V oc and J sc , for the sliding mode of TENG, can be written as follows: Voc=σxΔ0()l−xd2Δr2, 0.25emJsc=d∆σscdt, where σ is the tribocharge surface density, É© is the length of the dielectric layer (in this work, the length of the FEP film), d 2 is the thickness of the dielectric layer (in this work, the thickness of the FEP film), Δ 0 and Δ r2 are the dielectric permittivities of vacuum and the dielectric layer (FEP), respectively, t is the time, and x is the lateral separation distance. Since the maximum power of the TENG is governed by the tribocharge surface density σ , it is reasonable to implement strategies to increase the surface charge density on the triboelectric layers.…”
Section: Design and Fabricationmentioning
confidence: 99%
“…In the present case, TENG is operating in a sliding mode in the conductor-to-dielectric configuration (Al electrodes are conductors whereas the FEP film is a dielectric material). According to Shang et al 31 the V oc and J sc , for the sliding mode of TENG, can be written as follows:…”
Section: Design and Fabrication Of Tengmentioning
confidence: 99%
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“…If the electrodes are positioned only on the backside of the stator, then this structure gives rise to a freestanding mode triboelectric sensor (no electrical contact is needed from the mover) . To achieve high resolution, the metallic electrode gratings must be narrow (sub‐millimeter), usually achieved via photolithography, physical deposition, or ion‐etching methods. These methods are not particularly cost effective and are generally inefficient for fast prototyping.…”
Section: Introductionmentioning
confidence: 99%