A six-wafer combustion system for a silicon micro gas turbine engine

Mehra, A.; Zhang, Xin; Ayón, Arturo A.; Waitz, Ian A.; Schmidt, Martin; Spadaccini, Christopher M.

doi:10.1109/84.896774

Cited by 201 publications

(105 citation statements)

References 4 publications

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“…The coupling between fluid dynamics, heat transfer, and chemical kinetics is therefore much more prominent as system size decreases, making this coupling a critical criterion in the design process. 17 In view of the drawbacks and deficiencies of conventional TPV power systems discussed above, it is desirable to look further into the design of a combustor capable of rendering high and uniform temperature and high-intensity illumination along the combustor wall/emitter to enhance the radiation and thermal efficiency. This paper presents a combustor design with a transparent heat-regeneration reverse tube and a mixing-enhancing porous-medium fuel injector that improves the low illumination and incomplete combustion problems associated with miniature TPV systems.…”

Section: Introductionmentioning

confidence: 99%

Enhancing thermal, electrical efficiencies of a miniature combustion‐driven thermophotovoltaic system

Dunn‐Rankin

et al. 2009

Progress in Photovoltaics

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Methods to enhance the thermal and electrical efficiencies through novel design of combustion and thermal management of the combustor in a miniature thermophotovoltaic (TPV) system are proposed, discussed, and demonstrated in this paper. The miniature TPV system consists of a swirling combustor surrounded by GaSb PV cell arrays. The swirl combustor design, along with a heat-regeneration reverse tube and mixingenhancing porous-medium fuel injection, improves the low illumination and incomplete combustion problems associated with typical miniature TPV systems. A reverse tube is used to enforce swirling flame attachment to the inner wall of the emitter by pushing the swirl recirculation zone back into the chamber and simultaneously redirecting the hot product gas for reheating the outer surface of the emitter. The porous medium fuel injector is used as a fuel/air mixing enhancer and as a flame stabilizer to anchor the flame. The miniature TPV system, using different combustor configurations, is tested and discussed. Results indicate that the proposed swirling combustor with a reverse tube and porous medium can improve the intensity and uniformity of the emitter illumination, and can increase the thermal radiant efficiency. Consequently, the overall thermal efficiency and electrical output of the miniature TPV system are greatly enhanced.

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Section: Introductionmentioning

confidence: 99%

Enhancing thermal, electrical efficiencies of a miniature combustion‐driven thermophotovoltaic system

Dunn‐Rankin

et al. 2009

Progress in Photovoltaics

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“…The later version (Mehra, et al, 2000;Spadaccini, et al, 2003) extended from three wafers to six wafers with a larger chamber of 195 mm 3 , demonstrating the feasibility to burn not only hydrogen but also hydrocarbon fuels at higher power densities (e.g., about 500 MW/m 3 for ethylene-air mixture). Micro-scale gas turbines were also developed at Tohoku University and IHI corporation (Tanaka, et al, 2007).…”

Section: Brief Review On Micro Scale Combustion 31 Applicationmentioning

confidence: 99%

Progress in small-scale combustion

Nakamura

Gao

Matsuoka

2017

JTST

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This article briefly reviews the recent works related to small-scale combustion and its potential impact into combustion science and engineering is presented. Followed by a simple description of the scale effect on combustion to highlight its "unique" feature, past related works are then summarized. The impact of heat recirculation appearing in combustion systems, which is the most prominent feature of a micro-or small-scale combustion system, is focused upon and is understood that exactly the same strategy promising better combustion performance is confirmed irrespective of flame type (either premixed or non-premixed). With respect to this, paying attention to the entire combustor design, to optimize within the target working range is a crucial matter when micro-scale combustion is adopted. Potential subjects to be covered to further promote these aspects in this field are then presented.

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“…The use of metal, trilayer resist and thick thermal oxide masks (as in SCREAM) allow for the highest aspect ratio of the dry etch Process Chains [42], [49], [75]. DRIE uses these same principles and repeated isotropic and sidewall passivation/protection steps to achieve not only a high aspect ratio, but also higher etch rates, thus allowing structures to be fabricated with dimensions comparable to the wafer thickness [47], [48], [76].…”

Section: A Dimensionsmentioning

confidence: 99%

A Systematic Approach to Process Selection in MEMS

Quinn

Spearing

Ashby

et al. 2006

J. Microelectromech. Syst.

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Abstract-A systematic approach is developed to select manufacturing Process Chains for the generic elements of a MEMS device. A database of MEMS Process Chains and their attendant process attributes is developed from an extensive review of the literature, and used to construct Process Attribute charts. The performance requirements of MEMS beams and trenches are translated into the same set of Process Attributes. This allows for a screening of the Process Chains to obtain a list of candidate manufacturing methods. This method is illustrated in a brief design example.[1202]

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A six-wafer combustion system for a silicon micro gas turbine engine

Cited by 201 publications

References 4 publications

Enhancing thermal, electrical efficiencies of a miniature combustion‐driven thermophotovoltaic system

Enhancing thermal, electrical efficiencies of a miniature combustion‐driven thermophotovoltaic system

Progress in small-scale combustion

A Systematic Approach to Process Selection in MEMS

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