A six-degree-of-freedom micro-manipulator based on piezoelectric translators

Gao, Peng; Swei, Shan-Min

doi:10.1088/0957-4484/10/4/315

Cited by 63 publications

(30 citation statements)

References 9 publications

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“…8, is assembled by two differentkinds of 3-DOF positioning stages, an in-plane stage and an out-of-plane stage. In such a combination system, the references [24] and [27] have proposed, both of them have designed that the in-plane 3-DOF stage located at the bottom of the 6-DOF system has to carry the out-of-plane 3-DOF stage, whichhave much larger masses than the specimen itself.This requiresthe in-plane stage has an excellent carrying capacity and uses much more powerful actuators, which is ineffective in energy consumption during normal operation. However, these design ideas affect the performance of a precision positioning system significantly.…”

Section: Mechanical Designmentioning

confidence: 99%

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Design and control of a 6-degree-of-freedom precision positioning system

Cai

Tian

Wang

et al. 2017

Robotics and Computer-Integrated Manufacturing

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(2017) Design and control of a 6-degree-of-freedom precision positioning system. Robotics and Computer-Integrated Manufacturing, 44 . pp. 77-96. Permanent WRAP URL:http://wrap.warwick.ac.uk/81428 Copyright and reuse:The Warwick Research Archive Portal (WRAP) makes this work by researchers of the University of Warwick available open access under the following conditions. Copyright © and all moral rights to the version of the paper presented here belong to the individual author(s) and/or other copyright owners. To the extent reasonable and practicable the material made available in WRAP has been checked for eligibility before being made available.Copies of full items can be used for personal research or study, educational, or not-for-profit purposes without prior permission or charge. Provided that the authors, title and full bibliographic details are credited, a hyperlink and/or URL is given for the original metadata page and the content is not changed in any way. A note on versions:The version presented here may differ from the published version or, version of record, if you wish to cite this item you are advised to consult the publisher's version. Please see the 'permanent WRAP url' above for details on accessing the published version and note that access may require a subscription.For more information, please contact the WRAP Team at: wrap@warwick.ac.uk Design and Control of a6-degree-of-freedom Precision Positioning

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Section: Mechanical Designmentioning

confidence: 99%

“…Recently, many kinds of 6-DOF precision positioning systems have been reported. A piezoelectric actuator-based micromanipulator with six degrees of freedom was proposed in [24].…”

Section: Introductionmentioning

confidence: 99%

Design and control of a 6-degree-of-freedom precision positioning system

Cai

Tian

Wang

et al. 2017

Robotics and Computer-Integrated Manufacturing

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“…Figure 6. Six degree-of-freedom parallel mechanism [66] 3. Fundamental and modelling of piezoelectric actuator…”

Section: -Dof Parallel-kinematic Micro/nano Positioning Stagementioning

confidence: 99%

Recent Advances in the Control of Piezoelectric Actuators

Chi

2014

International Journal of Advanced Robotic Systems

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The micro/nano positioning field has made great progress towards enabling the advance of micro/nano technology. Micro/nano positioning stages actuated by piezoelectric actuators are the key devices in micro/nano manipulation. The control of piezoelectric actuators has emerged as a hot topic in recent years. Piezoelectric materials have inherent hysteresis and creep nonlinearity, which can reduce the accuracy of the manipulation, even causing the instability of the whole system. Remarkable efforts have been made to compensate for the nonlinearity of piezoelectric actuation through the mathematical modelling and control approaches. This paper provides a review of recent advances on the control of piezoelectric actuators. After a brief introduction of basic components of typical piezoelectric micro/nano positioning platforms, the working principle and modelling of piezoelectric actuators are outlined in this paper. This is followed with the major control method and recent progress is presented in detail. Finally, some open issues and future work on the control of piezoelectric actuators are extensively discussed.

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“…For example, Stewart and Delta mechanisms [4,5], are widely utilized on account to provide adequate motions in spatial or planar applications. The flexure based mechanisms are generally developed by replacing the conventional joints of the conventional parallel mechanism with flexure hinges.…”

Section: Introductionmentioning

confidence: 99%

Modeling and tracking control of a novel XYθz stage

et al. 2017

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A XYθ z stage is designed and experimentally tested. This developed stage is driven by three piezoelectric actuators (PZTs) and guided by a flexure hinge based mechanism with three symmetric T-shape hinges. It was manufactured monolithically by using wire electrical discharge machining (WEDM) technology. In addition, considering the both electrical and mechanical characteristics, a third-order dynamic model of the 3-DOF system has been established to investigate the relationship between the input voltage and the output displacement of the entire system. The parameters of the third-order dynamic model were estimated by using the system identification toolbox. Furthermore, decoupling control is also proposed to solve the existed coupling motion of the stage. In order to compensate the hysteresis of PZT, the inverse Bouc-Wen model was utilized as a feedforward hysteresis compensator.Finally, extensive experiments were performed to verify the good decoupling and tracking performances of the developed stage.

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A six-degree-of-freedom micro-manipulator based on piezoelectric translators

Cited by 63 publications

References 9 publications

Design and control of a 6-degree-of-freedom precision positioning system

Design and control of a 6-degree-of-freedom precision positioning system

Recent Advances in the Control of Piezoelectric Actuators

Modeling and tracking control of a novel XYθz stage

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