A six-degree-of-freedom measurement system for the motion accuracy of linear stages

Fan, Kuang‐Chao; Chen, M.J.; Huang, Wei-Lun

doi:10.1016/s0890-6955(97)00055-2

Cited by 96 publications

(31 citation statements)

References 3 publications

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“…According to Section 3.C and Section 2 (the roll measurement part), the influence of the roll on the vertical straightness [Eq. (12)] and the principle of the roll measurement [Eq. (3)] are both taken into account; then we will obtain γ m 2d r sin γ 2bcos γ − 1 D ;…”

Section: Crosstalk Compensation Between the Real Value And Measurementioning

confidence: 99%

“…Hence, for the roll crosstalk to the vertical straightness, each QD has its own compensation model, as described in Eq. (12). When the roll is introduced with a range of 70 00 , the results for each QD are shown in Fig.…”

Section: Compensation Experiments For Roll Crosstalk To the Two-directmentioning

confidence: 99%

“…However, only one error component can be measured during each adjustment and measurement. So, some simultaneous measuring methods for multi-degree-of-freedom error are studied [8][9][10][11][12][13], including the laser collimation method based on the cube corner prism. However, the crosstalk between each of the error components is a serious problem for this method.…”

Section: Introductionmentioning

confidence: 99%

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Errors crosstalk analysis and compensation in the simultaneous measuring system for five-degree-of-freedom geometric error

et al. 2015

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This paper presents the analysis and compensation of the errors crosstalk in our developed simultaneous measuring system for five-degree-of-freedom geometric error. The errors crosstalk, including the yaw crosstalk to the horizontal straightness, the pitch crosstalk to the vertical straightness, the roll crosstalk to the horizontal and vertical straightness, and the roll real value crosstalk to the roll measured value, can all be eliminated with the compensation. A series of experiments is conducted, and the results verify the compensation effect. For a linear stage, compared with an electronic level and a laser interferometer, the residuals are less than 2 00 when the roll errors are compensated, and the largest residuals for the compensated horizontal and vertical straightness are 1.9 and 3.5 μm, respectively.

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Section: Crosstalk Compensation Between the Real Value And Measurementioning

confidence: 99%

Section: Compensation Experiments For Roll Crosstalk To the Two-directmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Errors crosstalk analysis and compensation in the simultaneous measuring system for five-degree-of-freedom geometric error

et al. 2015

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“…The resolution of these measurement devices can reach the nanometric level and even the sub-nanometric level. Heterodyne interferometry is inherently more accurate than standard interferometry because it is less sensitive to intensity noise [2,3].…”

Section: Introductionmentioning

confidence: 99%

Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

Naeim¹,

Khodier²

2012

Int. J. Metrol. Qual. Eng.

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Abstract. In order to achieve nanometer accuracy, metrologists need to identify the sources of error and develop solutions to eradicate or minimize their effects. A stabilized low power dual-frequency laser heterodyne interferometer (ZMI-1000A) designed to measure linear and angular displacement with nominal measurement resolution 1.24 nm and 0.0025 arcsec, respectively, is used to achieve measurement of displacements over different travelling axes by comparison with the electronically reference measurements of the stage over wide range 500 mm. The repeatability and reversal error of linear stage over the working distance have agreed opto-electronically and the positioning uncertainty been reduced. A multivariable framework was implemented for the x-axis due to the cross coupling between the forward and backward course of the linear stage. Thermal error reduction is achieved using environmental temperature control (20 ± 0.2 • C) to help reduce thermal errors.

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“…The whole measurement period is long and efficiency is low as only one error is measured after setting and adjusting one time. At present, many methods of multi-degree-of-freedom measurement simultaneously are used such as geometrical optical measurement method [1] ，diffraction measurement method [2] ,laser tracking method [3] ，laser interference with collimation method [4] ，three parallel beams method [5] ， holographic lens prismatic method [6] and double-CCD method [7] . However, complex configurations, high costs and low measurement precisions are the shortcomings of these methods.…”

mentioning

confidence: 99%

A new five degree-of-freedom measurement method and system

2008

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In this paper, a newly developed system for simultaneously measuring five-degree-of-freedom errors of machine tools is introduced. A single-mode fiber-coupled laser module is used to eliminate the beam drift of the laser source. Only a cube corner retro-reflector and a beam splitter are adopted in the moving target in order to sense the straightness errors and angle errors (pitch and yaw) respectively and simultaneously. A special prism (including a beam-splitter facet and an all-reflecting facet) was adopted to measure the roll. A simple common-path compensation method for laser beam drift is put forward, and a 2D position-sensitive detector and a lens are used to monitor angular drift of the laser beam. It is convenient to measure the parameters of the numerical control machine in workshop due to non-cable connecting between moving target and measurement head. The error analysis and theory analysis of roll which provide potent theoretical guidance in the future are given in detail.Keywords: five degree-of-freedom, beam drift, quadrant photodiode detector, position sensitive detector .INTRODUCTIONAs we know the precision measurement of numerical control (NC) machine tool and processing center play the important role in machine tool industry and machine processing industry. There are 21 errors which need to be measured for a classical 3 axis NC machining facility. The whole measurement period is long and efficiency is low as only one error is measured after setting and adjusting one time. At present, many methods of multi-degree-of-freedom measurement simultaneously are used such as geometrical optical measurement method [1] ，diffraction measurement method [2] ,laser tracking method [3] ，laser interference with collimation method [4] ，three parallel beams method [5] ， holographic lens prismatic method [6] and double-CCD method [7] . However, complex configurations, high costs and low measurement precisions are the shortcomings of these methods. In this paper, a newly five-degree-of-freedom (5DOF) measuring method is put forward. Only one retro-reflector(R-R)，one reflector，one special prism are used to measure straightness errors， angular errors(yaw and pitch)， roll error respectively. It is convenient used in industry due to non-wires in the moving part, small size and simple structure.

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A six-degree-of-freedom measurement system for the motion accuracy of linear stages

Cited by 96 publications

References 3 publications

Errors crosstalk analysis and compensation in the simultaneous measuring system for five-degree-of-freedom geometric error

Errors crosstalk analysis and compensation in the simultaneous measuring system for five-degree-of-freedom geometric error

Nanometer positioning accuracy over a long term traveling stage based on heterodyne interferometry

A new five degree-of-freedom measurement method and system

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