1990
DOI: 10.1109/55.55268
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A simpler 100-V polysilicon TFT with improved turn-on characteristics

Abstract: An improved polysilicon high-voltage thin-film transistor (HVTFT) structure is proposed for eliminating the current-pinching phenomenon often observed in the conventional offset-gate polysilicon HVTFT's. The new HVTFT employs, in lieu of ion implantation, a metal field plate overlapping the entire offset region to control the conductivity of the offset region. By properly biasing the field plate to distribute the drain electric field at both ends, high-voltage operation of up to 100 V, suitable for many large-… Show more

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Cited by 56 publications
(14 citation statements)
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“…However, these methods increase the series resistances, and the ON-state current is sacrificed. A field-plate (FP) structure can increase the breakdown voltage, as well as the ON-state characteristics [15]. In this study, an FP was adopted to improve the breakdown characteristics without sacrificing the ON-state current.…”
Section: Introductionmentioning
confidence: 99%
“…However, these methods increase the series resistances, and the ON-state current is sacrificed. A field-plate (FP) structure can increase the breakdown voltage, as well as the ON-state characteristics [15]. In this study, an FP was adopted to improve the breakdown characteristics without sacrificing the ON-state current.…”
Section: Introductionmentioning
confidence: 99%
“…In the FID structure, a field-plate (or sub-gate) is employed to induce electrical drain extension. [7][8][9] The on current is therefore not significantly affected if an appropriate bias is applied on the field-plate. 7,8) Moreover, unlike the LDD approach, the FID structure does not suffer from implant damage in the offset source/drain region.…”
Section: Introductionmentioning
confidence: 99%
“…Within MFP structures the field peak can be located at either the drain or gate end of the offset region and the exact position is dependent upon the magnitude of the applied biases. 8 Within the OD structure the high field regions are again located at the edges of the offset region and arise from the depletion formed between the sharp corner of the gate ͑which is held at low potential͒ and the high drain potential. 13 The high field regions in OD and MFP structures typically result in oxide failure.…”
mentioning
confidence: 99%