A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes

Abstract

In this work, we use the micro-masonry technique to fabricate nanoplate resonators with integrated electrostatic actuation and capacitive detection in a few steps. Our approach is an alternative solution to the current fabrication methods used to create membranes and plates that usually rely on the selective etching of a sacrificial layer. Highly doped silicon plates were transfer printed using microtip elastomeric stamps onto insulated bases displaying cavities in order to form suspended structures with airtight gaps. By post-processing adequate interconnections, the fabricated resonators were actuated and their resonant frequency measured in a fully integrated manner. The tested nanoplate devices behave as predicted by theory and offer quality factors of more than 30 in air.

Micro-LEGO for MEMS

“…Those nanoplate resonators were tested by measuring their resonant frequency in a fully integrated manner. The results indicated that they performed as predicted by theory, and provided quality factors of more than 30 in air [106].…”

“…The structural integrity of nanoplates ensured by micro-LEGO allowed the fabrication of multiple suspended nanoplates in a single step and on the same single base, without mechanical crosstalk between them [105]. After the structural design was further modified and additional interconnects were formed, the nanoplate resonators performed with integrated electrostatic actuation and capacitance-sensing capabilities [106]. Those nanoplate resonators were tested by measuring their resonant frequency in a fully integrated manner.…”