“…However, commercially available piezoresistive sensors, which are usually based on semiconductors or polymer composites, are limited by their low thermal stability in air (Kanda and Suzuki, 1991). Recently, polymer-derived ceramics (PDCs) such as silicon oxycarbides (C / SiOC) or silicon carbo(oxy)nitrides (C / SiCN, C / SiOCN) have been shown to combine piezoresistivity (Riedel et al, 2010;Zhang et al, 2008, Terauds et al, 2010 with outstanding temperature and oxidation stability (Riedel et al, 1995(Riedel et al, , 1996. Hence, they are promising candidates for future high-temperature pressure sensors.…”