2008
DOI: 10.1111/j.1551-2916.2008.02275.x
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A Silicon Carbonitride Ceramic with Anomalously High Piezoresistivity

Abstract: The piezoresistive behavior of a silicon carbonitride ceramic derived from a polymer precursor is investigated under a uniaxial compressive loading condition. The electric conductivity has been measured as a function of the applied stress along both longitudinal and transverse directions. The gauge factor of the materials was then calculated from the data at different stress levels. The results show that the material exhibits an extremely high piezoresistive coefficient along both directions, ranging from 1000… Show more

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Cited by 124 publications
(101 citation statements)
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“…Recently they were shown to have giant gage factors for piezoresistivity at room temperature. 12,13 Such functional properties of the PDCs are sensitive to their composition and processing and, therefore, it would be possible to tailor them for specific applications. The PDCs are also attractive for multifunctional applications because they are processed from the polymer route at low temperatures (in this respect they are unusual since conventional ceramics must be processed at a temperature that is higher than their service temperature).…”
Section: Introductionmentioning
confidence: 99%
“…Recently they were shown to have giant gage factors for piezoresistivity at room temperature. 12,13 Such functional properties of the PDCs are sensitive to their composition and processing and, therefore, it would be possible to tailor them for specific applications. The PDCs are also attractive for multifunctional applications because they are processed from the polymer route at low temperatures (in this respect they are unusual since conventional ceramics must be processed at a temperature that is higher than their service temperature).…”
Section: Introductionmentioning
confidence: 99%
“…Compared to polycrystalline SiC-and Si 3 N 4 -based ceramics prepared by powder processing, PDCs possess many unusual and superior properties, including excellent stability against high-temperature decomposition and creep [1][2][3], outstanding oxidation and corrosion resistance [4][5][6], high temperature semiconducting behavior up to 1300°C [7,8], and extremely high piezoresistive effect [9][10][11]. These properties, combined with the direct polymer-to-ceramic process, make PDCs very promising for applications in ceramic fibers [12], ceramic matrix composites [13], energy storage [14], porous components [15], and high-temperature micro-sensors [16,17].…”
Section: Introductionmentioning
confidence: 99%
“…However, commercially available piezoresistive sensors, which are usually based on semiconductors or polymer composites, are limited by their low thermal stability in air (Kanda and Suzuki, 1991). Recently, polymer-derived ceramics (PDCs) such as silicon oxycarbides (C / SiOC) or silicon carbo(oxy)nitrides (C / SiCN, C / SiOCN) have been shown to combine piezoresistivity (Riedel et al, 2010;Zhang et al, 2008, Terauds et al, 2010 with outstanding temperature and oxidation stability (Riedel et al, 1995(Riedel et al, , 1996. Hence, they are promising candidates for future high-temperature pressure sensors.…”
Section: Introductionmentioning
confidence: 99%