A Short Overview on Monte Carlo Simulations of Ion Beam Penetration into Amorphous Solids

Posselt, M.

doi:10.1002/pssa.2210940141

phys. stat. sol. (a)

1986

DOI: 10.1002/pssa.2210940141

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A Short Overview on Monte Carlo Simulations of Ion Beam Penetration into Amorphous Solids

M. Posselt

Abstract: The main physical inputs and some practical applications of several Monte Carlo codes which have been developed in the last decade are shortly reviewed.

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1989

2011

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Cited by 2 publications

References 34 publications

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Linear Cascade Theory for Inhomogeneous Targets

Posselt¹

1989

Phys. Stat. Sol. (a)

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The concepts of the linear cascade theory and its application to inhomogeneous targets (layered structures, mask windows, and deep trenches) are shortly reviewed. To calculate range and energy deposition distributions there exist two different levels of the theoretical description: (i) Using the static BCA Monte Carlo simulations or the linearized Boltzmann transport equations (LBTE) the profiles can be determined for a given inhomogeneous structure, (ii) The profiles of the incident ion in the homogeneous components of the inhomogeneous target are assumed to be known. Then, an appropriate combination of these distributions leads to the profile in the inhomogeneous target.

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Linear Cascade Theory for Inhomogeneous Targets

Posselt¹

1989

Phys. Stat. Sol. (a)

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Ion beam irradiation of nanostructures – A 3D Monte Carlo simulation code

Borschel¹,

Ronning²

2011

Nuclear Instruments and Methods in Physics Research Section B:

101

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A Short Overview on Monte Carlo Simulations of Ion Beam Penetration into Amorphous Solids

Abstract: The main physical inputs and some practical applications of several Monte Carlo codes which have been developed in the last decade are shortly reviewed.

Cited by 2 publications

References 34 publications

Linear Cascade Theory for Inhomogeneous Targets

Linear Cascade Theory for Inhomogeneous Targets

Ion beam irradiation of nanostructures – A 3D Monte Carlo simulation code

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